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Applied Optics

Applied Optics


  • Vol. 29, Iss. 34 — Dec. 1, 1990
  • pp: 5159–5162

Real time interferometric ellipsometry with optical heterodyne and phase lock-in techniques

Chin-hwa Lin, Chien Chou, and Keh-su Chang  »View Author Affiliations

Applied Optics, Vol. 29, Issue 34, pp. 5159-5162 (1990)

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In this paper, we have combined a Mach-Zehnder interferometer and an optical heterodyne using an AO modulator to set up an interferometric ellipsometer for measuring the optical properties of metal surfaces. Because there is no moving mechanism, e.g., compensators and quarterwave plates, we can eliminate the errors caused by these elements. By using a phase lock-in technique and computer processing, we can measure parameters Ψ and Δ in real time and with great accuracy (where Ψ is the amplitude ratio of the P- and S-waves, and Δ is the phase difference in the P- and S-waves).

© 1990 Optical Society of America

Original Manuscript: May 22, 1989
Published: December 1, 1990

Chin-hwa Lin, Chien Chou, and Keh-su Chang, "Real time interferometric ellipsometry with optical heterodyne and phase lock-in techniques," Appl. Opt. 29, 5159-5162 (1990)

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  1. R. N. Shagam, “Heterodyne Interferometric and Moire Test Methods for Surface Measurements,” Ph.D. Thesis, U. Arizona, Tucson (1980).
  2. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1979).
  3. D. Malacara, Optical Shop Testing (Wiley, New York, 1978).
  4. Stanford Research Inc., SR-530 Lock-In Amplifer (1985).
  5. M. Born, E. Wolf, Principle of Optics (MacMillan, New York, 1964).
  6. V. C. Vanderbilt, “Polarization Photometer to Measure Bidirectional Reflectance Factor R(55°,0°;55°,180°) of Leaves,” Opt. Eng. 25, 566 (1986).
  7. R. M. A. Azzam, “Two-Detector Ellipsometer,” Rev. Sci. Instru. 56, 1746 (1985). [CrossRef]
  8. R. Greef, M. M. Wind, “Polar Representation of Ellipsometric Data,” Appl. Opt. 25, 1627–1629 (1986). [CrossRef] [PubMed]
  9. E. Valkonen, C.-G. Ribbing, J.-E. Sundgren, “Optical Constants of Thin TiN Films: Thickness and Preparation Effects,” Appl. Opt. 25, 3624–3630 (1986). [CrossRef] [PubMed]
  10. M. J. Verkerk, J. M. M. Raaymakers, “Characterization of the Topography of Vacuum-Deposited Films. 1: Light Scattering,” Appl. Opt. 25, 3602–3609 (1986). [CrossRef] [PubMed]

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