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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 29, Iss. 34 — Dec. 1, 1990
  • pp: 5159–5162

Real time interferometric ellipsometry with optical heterodyne and phase lock-in techniques

Chin-hwa Lin, Chien Chou, and Keh-su Chang  »View Author Affiliations


Applied Optics, Vol. 29, Issue 34, pp. 5159-5162 (1990)
http://dx.doi.org/10.1364/AO.29.005159


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Abstract

In this paper, we have combined a Mach-Zehnder interferometer and an optical heterodyne using an AO modulator to set up an interferometric ellipsometer for measuring the optical properties of metal surfaces. Because there is no moving mechanism, e.g., compensators and quarterwave plates, we can eliminate the errors caused by these elements. By using a phase lock-in technique and computer processing, we can measure parameters Ψ and Δ in real time and with great accuracy (where Ψ is the amplitude ratio of the P- and S-waves, and Δ is the phase difference in the P- and S-waves).

© 1990 Optical Society of America

History
Original Manuscript: May 22, 1989
Published: December 1, 1990

Citation
Chin-hwa Lin, Chien Chou, and Keh-su Chang, "Real time interferometric ellipsometry with optical heterodyne and phase lock-in techniques," Appl. Opt. 29, 5159-5162 (1990)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-29-34-5159

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