OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 29, Iss. 34 — Dec. 1, 1990
  • pp: 5159–5162

Real time interferometric ellipsometry with optical heterodyne and phase lock-in techniques

Chin-hwa Lin, Chien Chou, and Keh-su Chang  »View Author Affiliations


Applied Optics, Vol. 29, Issue 34, pp. 5159-5162 (1990)
http://dx.doi.org/10.1364/AO.29.005159


View Full Text Article

Enhanced HTML    Acrobat PDF (351 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

In this paper, we have combined a Mach-Zehnder interferometer and an optical heterodyne using an AO modulator to set up an interferometric ellipsometer for measuring the optical properties of metal surfaces. Because there is no moving mechanism, e.g., compensators and quarterwave plates, we can eliminate the errors caused by these elements. By using a phase lock-in technique and computer processing, we can measure parameters Ψ and Δ in real time and with great accuracy (where Ψ is the amplitude ratio of the P- and S-waves, and Δ is the phase difference in the P- and S-waves).

© 1990 Optical Society of America

History
Original Manuscript: May 22, 1989
Published: December 1, 1990

Citation
Chin-hwa Lin, Chien Chou, and Keh-su Chang, "Real time interferometric ellipsometry with optical heterodyne and phase lock-in techniques," Appl. Opt. 29, 5159-5162 (1990)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-29-34-5159


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. R. N. Shagam, “Heterodyne Interferometric and Moire Test Methods for Surface Measurements,” Ph.D. Thesis, U. Arizona, Tucson (1980).
  2. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1979).
  3. D. Malacara, Optical Shop Testing (Wiley, New York, 1978).
  4. Stanford Research Inc., SR-530 Lock-In Amplifer (1985).
  5. M. Born, E. Wolf, Principle of Optics (MacMillan, New York, 1964).
  6. V. C. Vanderbilt, “Polarization Photometer to Measure Bidirectional Reflectance Factor R(55°,0°;55°,180°) of Leaves,” Opt. Eng. 25, 566 (1986).
  7. R. M. A. Azzam, “Two-Detector Ellipsometer,” Rev. Sci. Instru. 56, 1746 (1985). [CrossRef]
  8. R. Greef, M. M. Wind, “Polar Representation of Ellipsometric Data,” Appl. Opt. 25, 1627–1629 (1986). [CrossRef] [PubMed]
  9. E. Valkonen, C.-G. Ribbing, J.-E. Sundgren, “Optical Constants of Thin TiN Films: Thickness and Preparation Effects,” Appl. Opt. 25, 3624–3630 (1986). [CrossRef] [PubMed]
  10. M. J. Verkerk, J. M. M. Raaymakers, “Characterization of the Topography of Vacuum-Deposited Films. 1: Light Scattering,” Appl. Opt. 25, 3602–3609 (1986). [CrossRef] [PubMed]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited