Thin SnOx films were applied to polyester foil by reactive rf magnetron sputtering. Typical data for 0.3-μm thick films were ~150-Ω resistance/square and ~76% luminous transmittance. Deposition rates exceeding 1 nm/s were obtained.
© 1990 Optical Society of America
Original Manuscript: July 19, 1989
Published: February 1, 1990
Bertil Stjerna and Claes G. Granqvist, "Transparent conducting SnOx films high rate reactively sputtered onto polyester foil," Appl. Opt. 29, 447-448 (1990)