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Applied Optics

Applied Optics


  • Vol. 29, Iss. 4 — Feb. 1, 1990
  • pp: 447–448

Transparent conducting SnOx films high rate reactively sputtered onto polyester foil

Bertil Stjerna and Claes G. Granqvist  »View Author Affiliations

Applied Optics, Vol. 29, Issue 4, pp. 447-448 (1990)

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Thin SnOx films were applied to polyester foil by reactive rf magnetron sputtering. Typical data for 0.3-μm thick films were ~150-Ω resistance/square and ~76% luminous transmittance. Deposition rates exceeding 1 nm/s were obtained.

© 1990 Optical Society of America

Original Manuscript: July 19, 1989
Published: February 1, 1990

Bertil Stjerna and Claes G. Granqvist, "Transparent conducting SnOx films high rate reactively sputtered onto polyester foil," Appl. Opt. 29, 447-448 (1990)

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  1. K. Itoyama, “Properties of Sn-Doped Indium Oxide Coatings Deposited on Polyester Film by High Rate Reactive Sputtering,” J. Electrochem. Soc. 126, 691–694 (1979). [CrossRef]
  2. M. J. Brett, R. W. McMahon, J. Affinito, R. R. Parsons, “High Rate Planar Magnetron Deposition of Transparent, Conducting, and Heat Reflecting Films on Glass and Plastic,” J. Vac. Sci. Technol. A 1, 352–355 (1983). [CrossRef]
  3. Z.-C. Jin, C. G. Granqvist, “Transparent and Infrared-Reflecting ZnO:Al Films Reactively Sputtered onto Polyester Foil,” Appl. Opt. 26, 3191–3192 (1987). [CrossRef] [PubMed]
  4. W. D. Munz, J. Heimbach, S. R. Reineck, “Reactive High Rate Sputtering of Oxides,” Thin Solid Films 86, 175–181 (1981). [CrossRef]
  5. F. Demichelis, E. Minetti-Mezzetti, A. Tagliaferro, E. Tresso, “Determination of Optical Properties of SnO2 Films,” Nuovo Cimento D 4, 68–78 (1984). [CrossRef]
  6. G. Beensh-Marchwicka, L. Krol-Stepniewska, A. Misiuk, “Influence of Annealing on the Phase Composition, Transmission and Resistivity of SnOx Thin Films,” Thin Solid Films 113, 215–224 (1984). [CrossRef]
  7. R. G. Goodchild, J. B. Webb, D. F. Williams, “Electrical Properties of Highly Conducting and Transparent Thin Films of Magnetron Sputtered SnO2,” J. Appl. Phys. 57, 2308–2310 (1985). [CrossRef]
  8. T. Minami, H. Nanto, S. Takata, “Highly Conducting and Transparent SnO2 Thin Films Prepared by RF Magnetron Sputtering on Low-Temperature Substrates,” Jpn. J. Appl. Phys. 27, L287–L289 (1988). [CrossRef]
  9. B. Stjerna, C. G. Granqvist, “Electrical Conductivity and Optical Transmittance of Sputter-Deposited SnOx Thin Films,” Solar Energy Mater. to be published.
  10. T. S. Eriksson, C. G. Granqvist, “Infrared Optical Properties of Silicon Oxynitride Films: Experimental Data and Theoretical Interpretation,” J. Appl. Phys. 60, 2081–2091 (1986). [CrossRef]
  11. G. Wyszecki, W. S. Stiles, Color Science (Wiley, New York, 1982), p. 256.

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