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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 29, Iss. 4 — Feb. 1, 1990
  • pp: 447–448

Transparent conducting SnOx films high rate reactively sputtered onto polyester foil

Bertil Stjerna and Claes G. Granqvist  »View Author Affiliations


Applied Optics, Vol. 29, Issue 4, pp. 447-448 (1990)
http://dx.doi.org/10.1364/AO.29.000447


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Abstract

Thin SnOx films were applied to polyester foil by reactive rf magnetron sputtering. Typical data for 0.3-μm thick films were ~150-Ω resistance/square and ~76% luminous transmittance. Deposition rates exceeding 1 nm/s were obtained.

© 1990 Optical Society of America

History
Original Manuscript: July 19, 1989
Published: February 1, 1990

Citation
Bertil Stjerna and Claes G. Granqvist, "Transparent conducting SnOx films high rate reactively sputtered onto polyester foil," Appl. Opt. 29, 447-448 (1990)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-29-4-447

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