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Applied Optics

Applied Optics


  • Vol. 29, Iss. 4 — Feb. 1, 1990
  • pp: 489–494

Depth resolution of the fluorescent confocal scanning optical microscope

Shigeharu Kimura and Chusuke Munakata  »View Author Affiliations

Applied Optics, Vol. 29, Issue 4, pp. 489-494 (1990)

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The fluorescent confocal scanning optical microscope is capable of 3-D observation, for which depth discrimination is vital. To characterize the depth discrimination capability of this microscope, intensity variations depending on fluorescence wavelength are simulated for fluorescent films being moved in the depth direction. Also, the resolution between two films is calculated for a range of fluorescence wavelengths. Results of experiments using photoresist films are compared to simulations. As a practical application, through-holes opened in a thick photoresist film are observed by slice images in the depth direction.

© 1990 Optical Society of America

Original Manuscript: October 25, 1988
Published: February 1, 1990

Shigeharu Kimura and Chusuke Munakata, "Depth resolution of the fluorescent confocal scanning optical microscope," Appl. Opt. 29, 489-494 (1990)

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