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Applied Optics

Applied Optics


  • Vol. 29, Iss. 4 — Feb. 1, 1990
  • pp: 505–511

High resolution measurement of multilayer structures

Thomas M. Merklein  »View Author Affiliations

Applied Optics, Vol. 29, Issue 4, pp. 505-511 (1990)

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It is possible to measure the thickness of a single layer by the fringes-of-equal-chromatic-order interferometric system with nanometer resolution. This method uses Muller fringes which represent the Fourier transformed autocorrelation (i.e., power spectrum) of the surfaces. We show how this method can be expanded to multilayer structures with a maximum total thickness of some millimeters and a resolution of better than the diameter of an atomic layer. It is possible to evaluate the real multilayer sequence by holographically measuring two power spectra.

© 1990 Optical Society of America

Original Manuscript: September 5, 1989
Published: February 1, 1990

Thomas M. Merklein, "High resolution measurement of multilayer structures," Appl. Opt. 29, 505-511 (1990)

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  1. J.-C. Vienot, J.-P. Goedgebuer, A. Lacourt, “Space and Time Variables in Optics and Holography: Recent Experimental Aspects,” Appl. Opt. 16, 454–461 (1977). [CrossRef] [PubMed]
  2. S. Tolansky, An Introduction to Interferometry (Longmans, London, 1966).
  3. N. Aebischer, J.-C. Vienot, “A Dispersive Device Linear in Wave-Numbers: Its Use in Space Time Optics,” Opt. Commun. 22, 103–106 (1977). [CrossRef]
  4. J.-C. Vienot, A. Lacuourt, M. Guignard, “Construction of an Interferometric Gauge System for Thickness Measurement in White Light,” Opt. Laser Technol.193–196 (Aug.1978).
  5. G. Hausler, W. Heckel, “Light Sectioning with Large Depth and High Resolution,” Appl. Opt. 27, 5165–5169 (1988). [CrossRef] [PubMed]
  6. J. Ishikawa, J. Tsujiuchi, T. Honda, “Accurate Measurement of Flatness by Multiple-Beam Interference,” Kogaku 11, 579 (1982), in Japanese.
  7. N. Wiener, Acta Math. 55, 117 (1930). [CrossRef]
  8. A. Y. Khinchine, Math. Ann. 109, 694 (1934).
  9. G. Hausler, J. Hutfiess, M. Maul, H. Weissmann, “Range Sensing Based on Shearing Interferometry,” Appl. Opt. 27, 4638–4644 (1988). [CrossRef] [PubMed]
  10. G. Bickel, G. Hausler, M. Maul, “Triangulation with Expanded Range of Depth,” Opt. Eng. 24, 975–977 (1985). [CrossRef]

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