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Applied Optics

Applied Optics


  • Vol. 29, Iss. 7 — Mar. 1, 1990
  • pp: 931–936

Two-dimensional array of diffractive microlenses fabricated by thin film deposition

Jürgen Jahns and Susan J. Walker  »View Author Affiliations

Applied Optics, Vol. 29, Issue 7, pp. 931-936 (1990)

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A 2-D array of 10 × 10 diffractive lenslets was fabricated and tested. Each lenslet has a rectangular aperture and a size of 1.5 mm × 1.5 mm. The focal length of each lenslet is 47 mm. The array was produced by depositing thin films of silicon monoxide on a quartz glass substrate and by using photolithographic techniques. The performance of the lenslets is based on the diffraction of light at a Fresnel zone plate (FZP). The FZP pattern was implemented as a phase structure with eight discrete levels. The diffraction efficiency was measured to be 91%.

© 1990 Optical Society of America

Original Manuscript: April 24, 1989
Published: March 1, 1990

Jürgen Jahns and Susan J. Walker, "Two-dimensional array of diffractive microlenses fabricated by thin film deposition," Appl. Opt. 29, 931-936 (1990)

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