OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 29, Iss. 7 — Mar. 1, 1990
  • pp: 931–936

Two-dimensional array of diffractive microlenses fabricated by thin film deposition

Jürgen Jahns and Susan J. Walker  »View Author Affiliations


Applied Optics, Vol. 29, Issue 7, pp. 931-936 (1990)
http://dx.doi.org/10.1364/AO.29.000931


View Full Text Article

Enhanced HTML    Acrobat PDF (1090 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A 2-D array of 10 × 10 diffractive lenslets was fabricated and tested. Each lenslet has a rectangular aperture and a size of 1.5 mm × 1.5 mm. The focal length of each lenslet is 47 mm. The array was produced by depositing thin films of silicon monoxide on a quartz glass substrate and by using photolithographic techniques. The performance of the lenslets is based on the diffraction of light at a Fresnel zone plate (FZP). The FZP pattern was implemented as a phase structure with eight discrete levels. The diffraction efficiency was measured to be 91%.

© 1990 Optical Society of America

History
Original Manuscript: April 24, 1989
Published: March 1, 1990

Citation
Jürgen Jahns and Susan J. Walker, "Two-dimensional array of diffractive microlenses fabricated by thin film deposition," Appl. Opt. 29, 931-936 (1990)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-29-7-931


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. T. Uchida, M. Furukawa, I. Kitano, K. Koizumi, H. Matsamura, “Optical Characteristics of a Light-Focusing Fiber Guide and its Applications,” IEEE J. Quantum Electron. QE-6, 606–612 (1970). [CrossRef]
  2. L. G. Cohen, M. V. Schneider, “Microlenses for Coupling Junction Lasers to Optical Fibers,” Appl. Opt. 13, 89–94 (1974). [CrossRef] [PubMed]
  3. K. Iga, M. Oikawa, S. Misawa, J. Banno, Y. Kokubun, “Stacked Planar Optics: An Application of the Planar Microlens,” Appl. Opt. 21, 3456–3460 (1982). [CrossRef] [PubMed]
  4. F. W. Ostermayer, P. A. Kohl, R. H. Burton, C. L. Zipfel, “Photochemical Formation of Integral Lenses on InP/InGaAsP LEDs,” in Proceedings IEEE Conference on Light Emitting Diodes and Photodetectors (1982).
  5. O. Wada, “Ion-Beam Etching of InP and its Applications to the Fabrication of High Radiance InGaAsP/InP Light Emitting Diodes,” J. Electrochem. Soc. 131, 2373–2380 (1983). [CrossRef]
  6. N. F. Borrelli, D. L. Morse, “Microlens Arrays Produced by a Photolytic Technique,” Appl. Opt. 27, 476–479 (1988). [CrossRef] [PubMed]
  7. Z. D. Popovic, R. A. Sprague, G. A. Neville Connell, “Technique for Monolithic Microlens Fabrication,” Appl. Opt. 27, 1281–1284 (1988). [CrossRef] [PubMed]
  8. H. Dammann, “Blazed Synthetic Phase-Only Holograms,” Optik 31, 95–104 (1970).
  9. L. D’Auria, J. P. Huignard, A. M. Roy, E. Spitz, “Photolithographic Fabrication of Thin Film Lenses,” Opt. Commun. 5, 232–235 (1972). [CrossRef]
  10. A. H. Firester, D. M. Hoffman, E. A. James, M. E. Heller, “Fabrication of Planar Optical Phase Elements,” Opt. Commun. 8, 160–162 (1973). [CrossRef]
  11. T. Shiono, K. Setsune, O. Yamazaki, K. Wasa, “Rectangular-Apertured Micro-Fresnel Lens Arrays Fabricated by Electron-Beam Lithography,” Appl. Opt. 26, 587–591 (1987). [CrossRef] [PubMed]
  12. J. R. Leger, M. L. Scott, P. Bundman, M. P. Griswold, “Astigmatic Wavefront Correction of a Gain-Guided Laser Diode Array Using Anamorphic Diffractive Microlenses,” Proc. Soc. Photo-Opt. Instrum. Eng. 884, 82–89 (1988).
  13. J. Jahns, N. Streibl, S. J. Walker, “Multilevel Phase Structures for Array Generations,” OE/LASE ’89, Los Angeles, Jan. 15–20, 1989.
  14. J. Jewell, S. L. McCall, “Microoptic Systems: Essential for Optical Computing,” Topical Meeting on Optical Computing, Salt Lake City, Feb. 27–March 1, 1989.
  15. J. Jahns, A. Huang, “Planar integration of free-space optical components,” Appl. Opt. 28, 1602–1605 (1989). [CrossRef] [PubMed]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited