Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Modeling of the field transfer through thick dielectric lines: use in linewidth measurement

Not Accessible

Your library or personal account may give you access

Abstract

A numerical method for calculating the optical image of a thick line object is presented. It consists of slicing (fictitiously) the object and of analyzing the propagation through each elementary slice. The method is first developed for coherent light and then generalized for partially coherent illumination. Some results are compared with other simulations and with experiments.

© 1991 Optical Society of America

Full Article  |  PDF Article
More Like This
Modeling optical microscope images of integrated-circuit structures

Chi-Min Yuan and Andrzej J. Strojwas
J. Opt. Soc. Am. A 8(5) 778-790 (1991)

Optical microscope imaging of lines patterned in thick layers with variable edge geometry: theory

Diana Nyyssonen and Chris P. Kirk
J. Opt. Soc. Am. A 5(8) 1270-1280 (1988)

Time resolved imaging through a highly scattering medium

Jeremy C. Hebden, Robert A. Kruger, and K. S. Wong
Appl. Opt. 30(7) 788-794 (1991)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (25)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.