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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 30, Iss. 19 — Jul. 1, 1991
  • pp: 2685–2691

Efficient optical elements to generate intensity weighted spot arrays: design and fabrication

Mark P. Dames, Robert J. Dowling, Paul McKee, and David Wood  »View Author Affiliations


Applied Optics, Vol. 30, Issue 19, pp. 2685-2691 (1991)
http://dx.doi.org/10.1364/AO.30.002685


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Abstract

We report on the design and fabrication of fully 2-D surface relief diffraction elements that can split a single collimated beam into many beams in an arbitrary intensity distribution. These splitters were designed by computer using simulated annealing, and made into phase gratings by electron-beam lithography followed by plasma etching into quartz glass. Both two and four phase level gratings have been fabricated, allowing a wide range of uniform and weighted spot patterns to be generated. These grating elements have a measured diffraction efficiency of over 74%, with the beam intensity ratios accurate to within 1% of their target values.

© 1991 Optical Society of America

History
Original Manuscript: October 22, 1990
Published: July 1, 1991

Citation
Mark P. Dames, Robert J. Dowling, Paul McKee, and David Wood, "Efficient optical elements to generate intensity weighted spot arrays: design and fabrication," Appl. Opt. 30, 2685-2691 (1991)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-30-19-2685


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References

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