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Applied Optics

Applied Optics


  • Vol. 30, Iss. 19 — Jul. 1, 1991
  • pp: 2795–2800

Determination of thin film optical parameters from photometric measurements: an algebraic solution for the (T,Rf,Rb) method

Valentin Panayotov and Ivan Konstantinov  »View Author Affiliations

Applied Optics, Vol. 30, Issue 19, pp. 2795-2800 (1991)

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A new method of analysis for the simultaneous determination of the optical constants and the thickness of thin films is proposed. It requires measurements under normal incidence of the transmission and of the reflections from both sides of a thin film deposited on a nonabsorbing substrate. An algebraic inversion technique is developed involving a numerical interpolation procedure in the last step. There are no missing solutions. The physical solution can be isolated by a comparison with some film thickness estimates or by measurements in a wavelength range.

© 1991 Optical Society of America

Original Manuscript: July 23, 1990
Published: July 1, 1991

Valentin Panayotov and Ivan Konstantinov, "Determination of thin film optical parameters from photometric measurements: an algebraic solution for the (T,Rf,Rb) method," Appl. Opt. 30, 2795-2800 (1991)

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  1. O. S. Heavens, Optical Properties of Thin Solid Films (Butterworth, London, 1955), Chap. 5.
  2. H. M. Liddell, Computer Aided Techniques for the Design of Multilayer Filters (Hilger, Bristol, 1981), Chap. 6.
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  13. Ref. 2, p. 7.
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