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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 30, Iss. 19 — Jul. 1, 1991
  • pp: 2795–2800

Determination of thin film optical parameters from photometric measurements: an algebraic solution for the (T,Rf,Rb) method

Valentin Panayotov and Ivan Konstantinov  »View Author Affiliations


Applied Optics, Vol. 30, Issue 19, pp. 2795-2800 (1991)
http://dx.doi.org/10.1364/AO.30.002795


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Abstract

A new method of analysis for the simultaneous determination of the optical constants and the thickness of thin films is proposed. It requires measurements under normal incidence of the transmission and of the reflections from both sides of a thin film deposited on a nonabsorbing substrate. An algebraic inversion technique is developed involving a numerical interpolation procedure in the last step. There are no missing solutions. The physical solution can be isolated by a comparison with some film thickness estimates or by measurements in a wavelength range.

© 1991 Optical Society of America

History
Original Manuscript: July 23, 1990
Published: July 1, 1991

Citation
Valentin Panayotov and Ivan Konstantinov, "Determination of thin film optical parameters from photometric measurements: an algebraic solution for the (T,Rf,Rb) method," Appl. Opt. 30, 2795-2800 (1991)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-30-19-2795


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References

  1. O. S. Heavens, Optical Properties of Thin Solid Films (Butterworth, London, 1955), Chap. 5.
  2. H. M. Liddell, Computer Aided Techniques for the Design of Multilayer Filters (Hilger, Bristol, 1981), Chap. 6.
  3. D. P. Arndt et al., “Multiple Determination of the Optical Constants of Thin-Film Coating Materials,” Appl. Opt. 24, 3571–3596 (1984). [CrossRef]
  4. F. Abeles, M. L. Theye, “Méthode De Calcul Des Constantes Optiques Des Couches Minces Absorbantes À Partir De Mesures De Réflexion Et De Transmission,” Surf. Sci. 5, 325–331 (1966). [CrossRef]
  5. J. M. Bennett, M. J. Booty, “Computational Method for Determining n and k for a Thin Film from the Measured Reflectance, Transmittance, and Film Thickness,” Appl. Opt. 5, 41–43 (1966). [CrossRef] [PubMed]
  6. W. N. Hansen, “Optical Characterization of Thin Films: Theory,” J. Opt. Soc. Am. 63, 793–802 (1973). [CrossRef]
  7. J. E. Nestell, R. W. Christy, “Derivation of Optical Constants of Metals from Thin-Film Measurements at Oblique Incidence,” Appl. Opt. 11, 643–651 (1972). [CrossRef] [PubMed]
  8. W. E. Case, “Algebraic Method for Extracting Thin-Film Optical Parameters from Spectrophotometer Measurements,” Appl. Opt. 22, 1832–1836 (1983). [CrossRef] [PubMed]
  9. D. M. Spink, C. B. Thomas, “Optical Constant Determination of Thin Films: an Analytical Solution,” Appl. Opt. 27, 4362–4362 (1988). [CrossRef] [PubMed]
  10. C. L. Nagendra, G. K. M. Thutupalli, “Optical constants of absorbing films,” Vacuum 31, 141–145 (1981). [CrossRef]
  11. A. Hjortsberg, “Determination of Optical Constants of Absorbing Materials Using Transmission and Reflection of Thin Films on Partially Metallized Substrates: Analysis of the new (T,Rm) Technique,” Appl. Opt. 20, 1254–1263 (1981). [CrossRef] [PubMed]
  12. Ref. 1, pp. 55–58.
  13. Ref. 2, p. 7.
  14. R. C. McPhedran, L. C. Botten, D. R. McKenzie, R. P. Netterfield, “Unambiguous Determination of Optical Constants of Absorbing Films by Reflectance and Transmittance Measurements,” Appl. Opt. 23, 1197–1205 (1984). [CrossRef] [PubMed]
  15. Ref. 2, p. 19.

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