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Applied Optics

Applied Optics


  • Vol. 30, Iss. 22 — Aug. 1, 1991
  • pp: 3221–3227

Light-scattering measurement of the rms slopes of rough surfaces

Lin-xiang Cao, Theodore V. Vorburger, A. George Lieberman, and Thomas R. Lettieri  »View Author Affiliations

Applied Optics, Vol. 30, Issue 22, pp. 3221-3227 (1991)

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Angle-resolved light scattering (ARLS) is used to estimate the root-mean-square (rms) slopes of rough surfaces having a well-defined lay, and the effect on slope measurements caused by changing the angles of incidence and scattering is investigated. The ARLS patterns are taken with the Detector Array for Laser Light Angular Scattering (Dallas) research instrument, and the rms slopes are obtained from the angular widths of these patterns. In general, it was found that the angular width, and thus the estimated rms slope, is surprisingly insensitive to relatively large changes in both the incident and scattering angles of light. These results are independent of surface material and are valid for both sinusoidal and random rough surfaces with lay. The principles, experiments, analyses, and conclusions involved in using ARLS to estimate rms surface slopes are described.

© 1991 Optical Society of America

Original Manuscript: June 15, 1990
Published: August 1, 1991

Lin-xiang Cao, Theodore V. Vorburger, A. George Lieberman, and Thomas R. Lettieri, "Light-scattering measurement of the rms slopes of rough surfaces," Appl. Opt. 30, 3221-3227 (1991)

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  13. These models are valid, strictly speaking, only in the Fraunhofer region, whereas in the present experiments the scattering was in the Fresnel region. However, the difference is expected to be negligible.
  14. R. Brodmann, D. Gerstorfer, G. Thurn, “Optical roughness measuring instrument for fine-machined surfaces,” Opt. Eng. 24, 408–413 (1985).

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