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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 30, Iss. 22 — Aug. 1, 1991
  • pp: 3221–3227

Light-scattering measurement of the rms slopes of rough surfaces

Lin-xiang Cao, Theodore V. Vorburger, A. George Lieberman, and Thomas R. Lettieri  »View Author Affiliations


Applied Optics, Vol. 30, Issue 22, pp. 3221-3227 (1991)
http://dx.doi.org/10.1364/AO.30.003221


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Abstract

Angle-resolved light scattering (ARLS) is used to estimate the root-mean-square (rms) slopes of rough surfaces having a well-defined lay, and the effect on slope measurements caused by changing the angles of incidence and scattering is investigated. The ARLS patterns are taken with the Detector Array for Laser Light Angular Scattering (Dallas) research instrument, and the rms slopes are obtained from the angular widths of these patterns. In general, it was found that the angular width, and thus the estimated rms slope, is surprisingly insensitive to relatively large changes in both the incident and scattering angles of light. These results are independent of surface material and are valid for both sinusoidal and random rough surfaces with lay. The principles, experiments, analyses, and conclusions involved in using ARLS to estimate rms surface slopes are described.

© 1991 Optical Society of America

History
Original Manuscript: June 15, 1990
Published: August 1, 1991

Citation
Lin-xiang Cao, Theodore V. Vorburger, A. George Lieberman, and Thomas R. Lettieri, "Light-scattering measurement of the rms slopes of rough surfaces," Appl. Opt. 30, 3221-3227 (1991)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-30-22-3221


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References

  1. T. V. Vorburger, E. C. Teague, “Optical techniques for online measurement of surface topography,” Precis. Eng. 3, 61–83 (1981). [CrossRef]
  2. See, for example, J. M. Bennett, L. Mattsson, Introduction to Surface Roughness and Scattering (Optical Society of America, Washington, D.C., 1989).
  3. J. H. Rakels, “Recognized surface finish parameters obtained from diffraction patterns of rough surfaces,” in Proceedings on Surface Measurement and Characterization, J. M. Bennett, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1009, 119–125 (1988).
  4. P. Z. Takacs, R. C. Hewitt, E. L. Church, “Correlation between the performance and metrology of glancing-incidence synchrotron-radiation mirrors containing millimeter-wavelength shape errors,” in Proceedings on Metrology: Figure and Finish, B. Truax, ed., Proc. Soc. Photo-Opt. Instrum. Eng.749, 119–124 (1987).
  5. R. Brodmann, M. Allgauer, “Comparison of light scattering from rough surfaces with optical and mechanical profilometry,” in Proceedings on Surface Measurement and Characterization, J. M. Bennett, ed., Proc. Photo-Opt. Instrum. Eng.1009, 111–118 (1988).
  6. M. Kamei, T. Inari, “On-line monitoring of surface roughness by using laser,” in Proceedings on Production Aspects of Single Point Machined Optics, D. P. Brehm, ed., Proc. Soc. Photo-Opt. Instrum. Eng.508, 56–63 (1984).
  7. See, for example, P. Beckmann, A. Spizzichino, The Scattering of Electromagnetic Waves from Rough Surfaces (Pergamon, New York, 1963).
  8. T. V. Vorburger, E. C. Teague, F. E. Scire, M. J. McLay, D. E. Gilsinn, “Surface roughness studies with DALLAS—Detector array for laser light angular scattering,” J. Res. Natl. Bur. Stand. 89, 3–16 (1984). [CrossRef]
  9. E. C. Teague, F. E. Scire, T. V. Vorburger, “Sinusoidal profile precision roughness specimens,” Wear 83, 61–73 (1982). [CrossRef]
  10. ASME/ANSI B46.1-1985, Surface Texture (American Society of Mechanical Engineers, New York, 1985).
  11. D. G. Chetwynd, “The digitization of surface profiles,” Wear 57, 137–140 (1979). [CrossRef]
  12. P. R. Bevington, Data Reduction and Error Analysis for the Physical Sciences (McGraw-Hill, New York, 1969).
  13. These models are valid, strictly speaking, only in the Fraunhofer region, whereas in the present experiments the scattering was in the Fresnel region. However, the difference is expected to be negligible.
  14. R. Brodmann, D. Gerstorfer, G. Thurn, “Optical roughness measuring instrument for fine-machined surfaces,” Opt. Eng. 24, 408–413 (1985).

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