Stress, scatter, and structure dependence on composition of thin films of Si–YF3 and ZnSe–SrF2
Applied Optics, Vol. 30, Issue 4, pp. 495-499 (1991)
http://dx.doi.org/10.1364/AO.30.000495
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Abstract
Composition dependent structural, optical, and mechanical properties of codeposited thin films were studied in the Si–YF3 and ZnSe–SrF2 systems. Intrinsic stress varies nonlinearly in both systems. In the Si–YF3 system, the stress becomes slightly compressive for intermediate compositions, even though it is highly tensile in the pure constituent thin films. In the ZnSe–SrF2 system, optical scatter and intrinsic stress exhibit abrupt changes at ∼60-vol % SrF2, accompanied by a change in the dominant crystalline orientation. Possible structure–property relationships and composition ranges for practical applications of thick films are also discussed.
© 1991 Optical Society of America
Citation
Haluk O. Sankur, Jeff DeNatale, and William J. Gunning, "Stress, scatter, and structure dependence on composition of thin films of Si–YF3 and ZnSe–SrF2," Appl. Opt. 30, 495-499 (1991)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-30-4-495
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