Because some are of the opinion that the limits of optical technology are near, a once-promising, though slow, technology is being revitalized. Will electron beam lithography make it this time, using multiple beam systems? This short survey is reprinted, by permission, from the Business Day section of The New York Times of 20 June 1990.
© 1991 Optical Society of America
John Markoff, "Etching the chips of the future," Appl. Opt. 30, 715-716 (1991)