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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 30, Iss. 7 — Mar. 1, 1991
  • pp: 868–873

Microfabricated incandescent lamps

C. H. Mastrangelo, R. S. Muller, and S. Kumar  »View Author Affiliations


Applied Optics, Vol. 30, Issue 7, pp. 868-873 (1991)
http://dx.doi.org/10.1364/AO.30.000868


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Abstract

A silicon filament vacuum sealed incandescent light source has been fabricated using IC technology. The incandescent source consists of a heavily doped p+ polysilicon filament coated with silicon nitride and enclosed in a vacuum sealed (≈80-mT) cavity in the silicon chip surface. The filament is electrically heated to reach incandescence at a temperature near 1400 K. The power required to achieve this temperature for a filament 510 × 5 × 1 μm3 is 5 mW yielding a total optical power of 250 μm with a peak distribution wavelength near 2.5 μW. The radiation emitted by this source approximately follows Lambert’s cosine law. The energy conversion efficiency is 5%.

© 1991 Optical Society of America

History
Original Manuscript: May 7, 1989
Published: March 1, 1991

Citation
C. H. Mastrangelo, R. S. Muller, and S. Kumar, "Microfabricated incandescent lamps," Appl. Opt. 30, 868-873 (1991)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-30-7-868


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