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Applied Optics

Applied Optics


  • Vol. 31, Iss. 1 — Jan. 1, 1992
  • pp: 140–143

Optical diagnostics of slightly rough surfaces

O. V. Angelsky and P. P. Maksimyak  »View Author Affiliations

Applied Optics, Vol. 31, Issue 1, pp. 140-143 (1992)

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The relationship between the statistical structure parameters of a rough surface and the associated correlation parameters of a scattered field is used to develop a method for rough-surface diagnostics. The treatment is based on the model of a random phase object with an inhomogeneity phase dispersion σ 2 < 1. The proposed diagnostic methods are applicable to surfaces with a roughness period comparable to the radiation wavelength employed and the surfaces of a thin plane-parallel plate. The sensitivity limit of the methods in measuring the standard deviation of surface-roughness element heights is ~0.003 μm.

© 1992 Optical Society of America

Original Manuscript: May 31, 1990
Published: January 1, 1992

O. V. Angelsky and P. P. Maksimyak, "Optical diagnostics of slightly rough surfaces," Appl. Opt. 31, 140-143 (1992)

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