The relationship between the statistical structure parameters of a rough surface and the associated correlation parameters of a scattered field is used to develop a method for rough-surface diagnostics. The treatment is based on the model of a random phase object with an inhomogeneity phase dispersion σφ02 < 1. The proposed diagnostic methods are applicable to surfaces with a roughness period comparable to the radiation wavelength employed and the surfaces of a thin plane-parallel plate. The sensitivity limit of the methods in measuring the standard deviation of surface-roughness element heights is ~0.003 µm.
© 1992 Optical Society of America
O. V. Angelsky and P. P. Maksimyak, "Optical diagnostics of slightly rough surfaces," Appl. Opt. 31, 140-143 (1992)