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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 31, Iss. 1 — Jan. 1, 1992
  • pp: 140–143

Optical diagnostics of slightly rough surfaces

O. V. Angelsky and P. P. Maksimyak  »View Author Affiliations


Applied Optics, Vol. 31, Issue 1, pp. 140-143 (1992)
http://dx.doi.org/10.1364/AO.31.000140


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Abstract

The relationship between the statistical structure parameters of a rough surface and the associated correlation parameters of a scattered field is used to develop a method for rough-surface diagnostics. The treatment is based on the model of a random phase object with an inhomogeneity phase dispersion σ 2 < 1. The proposed diagnostic methods are applicable to surfaces with a roughness period comparable to the radiation wavelength employed and the surfaces of a thin plane-parallel plate. The sensitivity limit of the methods in measuring the standard deviation of surface-roughness element heights is ~0.003 μm.

© 1992 Optical Society of America

History
Original Manuscript: May 31, 1990
Published: January 1, 1992

Citation
O. V. Angelsky and P. P. Maksimyak, "Optical diagnostics of slightly rough surfaces," Appl. Opt. 31, 140-143 (1992)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-31-1-140


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References

  1. H. P. Baltes, Inverse Source Problems in Optics (Springer-Verlag, Berlin, 1978). [CrossRef]
  2. V. N. Moiseyev, V. I. Mandrosov, “Informativeness of speckled coherent images,” Zarubezhnaya Radioelektron. 2, 3–21 (1982).
  3. H. Fujii, F. Asakura, Y. Shindo, “Measurement of surface roughness properties by means of laser speckle techniques,” Opt. Commun. 16, 68–72 (1976). [CrossRef]
  4. J. W. Goodman, “Dependence of image speckle contrast of surface roughness,” Opt. Commun. 14, 324–327 (1975). [CrossRef]
  5. O. V. Angelsky, V. G. Zhitaryuk, P. P. Maksimyak, “On the possibility of optical correlation measurement of inhomogeneous phase statistical surfaces,” Opt. Spektrosk. 60, 1013–1017 (1986).
  6. O. V. Angelsky, P. P. Maksimyak, T. O. Perun, “Optical correlation systems for studying weak surface roughness,” in Fringe ’89 Automatic Processing of Fringe Patterns, W. Osten, R. J. Pryputniewicz, G. T. Reid, H. Rottenkolber, eds. (Akademie, Berlin, 1989), p. 53.
  7. O. V. Anglesky, I. I. Magun, P. P. Maksimyak, “Optical correlation methods in the studies of inhomogeneous phase samples,” presented at the Third International Symposium on Modern Optics, Budapest, Hungary, 1988.
  8. S. M. Rytov, Yu. A. Kravtsov, B. I. Tatarsky, Introduction to Statistical Radiophysics. Part II. Random Fields (Nauka, Moscow, 1978), p. 464.

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