OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 31, Iss. 10 — Apr. 1, 1992
  • pp: 1377–1384

Linewidth measurement of gratings on photomasks: a simple technique

S. Sohail H. Naqvi, Susan Gaspar, Kirt Hickman, Ken Bishop, and John R. McNeil  »View Author Affiliations


Applied Optics, Vol. 31, Issue 10, pp. 1377-1384 (1992)
http://dx.doi.org/10.1364/AO.31.001377


View Full Text Article

Enhanced HTML    Acrobat PDF (936 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A novel laser scatterometer linewidth measurement tool has been developed for critical dimension metrology of photomasks. Calculation of the linewidth is based on a rigorous theoretical model, thus eliminating the need for calibrations. In addition the effect of the glass substrate on which the photomask grating is placed is explicitly taken into account. The experimental arrangement consists of a chrome photomask diffraction grating that is illuminated with a laser. A rigorous theoretical model is used to provide a lookup table that gives the power in the transmitted zero-order beam as a function of the linewidth for a fixed pitch of the grating. The predicted linewidth values are compared with those that are obtained by using commercial optical linewidth measurement systems, and excellent agreement is obtained.

© 1992 Optical Society of America

History
Original Manuscript: August 17, 1990
Published: April 1, 1992

Citation
S. Sohail H. Naqvi, Susan Gaspar, Kirt Hickman, Ken Bishop, and John R. McNeil, "Linewidth measurement of gratings on photomasks: a simple technique," Appl. Opt. 31, 1377-1384 (1992)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-31-10-1377

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you wish to use one of your free member downloads to view the figures, click "Enhanced HTML" above and access the figures from the article itself or from the navigation tab.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited