A ruling engine for large and/or high-groove density gratings is developed. A hybrid driving method that uses a piezoelectric device and a screw-nut mechanism is adopted to achieve stop-and-go blank motion with a closed-loop control system. Several test gratings, including a ruled area of 300(width) × 200(groove length) mm2, groove densities of 6000 and 10,000 grooves/mm, and a uniform and varied-line space, are ruled to confirm the basic functions of the ruling engine. A set of four spherical, varied-line-space gratings with central groove densities of 6000, 4550, 3450, and 2616 grooves/mm and a ruled area of 200 × 200 mm2 is ruled for the orbital retrievable far and extreme ultraviolet spectrometer.
© 1992 Optical Society of America
Original Manuscript: February 19, 1991
Published: April 1, 1992
Toshiaki Kita and Tatsuo Harada, "Ruling engine using a piezoelectric device for large and high-groove density gratings," Appl. Opt. 31, 1399-1406 (1992)