The theory and measurement of angle-resolved scatter are described. Values of rms roughness that were obtained by using this technique to characterize four different materials are compared with values that were obtained by using a total integrated scatter measuring instrument, an optical profiler, and a mechanical profiler. The spatial frequency bandwidths and modulation transfer functions of the four instruments are different, and results are described in light of these differences.
© 1992 Optical Society of America
Original Manuscript: March 12, 1990
Published: April 1, 1992
R. D. Jacobson, S. R. Wilson, G. A. Al-Jumaily, J. R. McNeil, Jean M. Bennett, and Lars Mattsson, "Microstructure characterization by angle-resolved scatter and comparison to measurements made by other techniques," Appl. Opt. 31, 1426-1435 (1992)