The integration issues regarding liquid crystals and silicon-chip technology are discussed. A 12 × 12 active-matrix array is fabricated in silicon and addresses a ferroelectric liquid crystal. The structure and performance of the resulting electronically addressed spatial light modulator are reported.
© 1992 Optical Society of America
David Armitage and Donald K. Kinell, "Liquid-crystal integrated silicon spatial light modulator," Appl. Opt. 31, 3945-3949 (1992)