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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 31, Iss. 20 — Jul. 10, 1992
  • pp: 3945–3949

Liquid-crystal integrated silicon spatial light modulator

David Armitage and Donald K. Kinell  »View Author Affiliations


Applied Optics, Vol. 31, Issue 20, pp. 3945-3949 (1992)
http://dx.doi.org/10.1364/AO.31.003945


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Abstract

The integration issues regarding liquid crystals and silicon-chip technology are discussed. A 12 × 12 active-matrix array is fabricated in silicon and addresses a ferroelectric liquid crystal. The structure and performance of the resulting electronically addressed spatial light modulator are reported.

© 1992 Optical Society of America

History
Original Manuscript: February 19, 1991
Published: July 10, 1992

Citation
David Armitage and Donald K. Kinell, "Liquid-crystal integrated silicon spatial light modulator," Appl. Opt. 31, 3945-3949 (1992)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-31-20-3945


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References

  1. N. Collings, W. A. Crossland, P. J. Ayliff, D. G. Vass, I. Underwood, “Evolutionary development of advanced liquid crystal spatial light modulators,” Appl. Opt. 28, 4740–4748 (1989).
  2. L. K. Cotter, T. J. Drabik, R. J. Dillon, M. A. Handschy, “Ferroelectric liquid crystal/silicon integrated circuit spatial light modulator,” Opt. Lett. 15, 291–293 (1990).
  3. M. A. Handschy, T. J. Drabik, L. K. Cotter, S. D. Gaalema, “Fast ferroelectric-liquid-crystal spatial light modulator with silicon-integrated circuit active backplane,” in Optical and Digital Galluium Arsenide Technologies for Signal Processing Applications, M. P. Bendett, D. H. Butler, A. Prabhakar, A. Yang, eds., Proc. Soc. Photo-Opt. Instrum. Eng.1291, 158–164 (1990).
  4. D. A. Jared, T. Slagle, K. M. Johnson, K. Wagner, “Optically addressed CMOS VLSI liquid-crystal spatial light modulator,” in Annual Meeting 1989, Vol. 18 of OSA 1989 Technical Digest Series (Optical Society of America, Washington, D.C., 1989), p. 255.
  5. D. Jared, K. M. Johnson, “Optically addressed thresholding of VLSI liquid crystal SLM’s,” Opt. Lett. 16, p. 967 (1991).
  6. D. Armitage, D. K. Kinell, “Miniature spatial light modulators,” in Advances in Optical Information Processing IV, D. R. Pape, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1296, 158–165 (1990).
  7. T. Yamazaki, Y. Kawahara, S. Motte, H. Kamamori, J. Nakamura, “A liquid-crystal TV display panel incorporating drivers,” Proc. Soc. Inf. Disp. 23/4, 223–226 (1982).
  8. L. A. Beresnev, V. G. Chigrinov, D. I. Dergachev, E. P. Poshidaev, J. Funfschilling, M. Schadt, “Deformed helix ferroelectric liquid crystal display: a new electrooptic mode in ferroelectric chiral smectic C liquid crystals,” Liq. Cryst. 5, 1171–1177 (1989).
  9. J. Funfschilling, M. Schadt, “Fast responding and highly multiplexible distorted helix ferroelectric liquid crystal displays,” J. Appl. Phys. 66, 3877–3882 (1989).
  10. D. Armitage, “Gray-scale ferroelectrical liquid crystal devices,” in Liquid Crystal Displays and Applications, J. W. Doane, Z. Yaniv, eds., Proc. Soc. Photo-Opt. Instrum. Eng.1257, 116–124 (1990).
  11. L. Liau, A. Muray, M. Chen, “Impact of wafer flatness on submicron optical lithography,” in Optical Microlithography VI, H. L. Stover, ed. Proc. Soc. Photo-Opt. Instrum. Eng.772, 232–238 (1987).
  12. D. I. Golland, R. L. Ammlung, W. C. Krusell, “200-mm silicon wafer future trends: flatter and cleaner,” Semicond. Int. (USA) 11, 151–155 (1988).
  13. L. E. Stillwagon, “Planarization of substrate topography by spin-coated films: a review,” Solid State Technol. 30, 67–71 (June1987).
  14. S. K. Gupta, “Spin-on glass for dielectric planarization,” Microelectron. Manuf. Test. 12(4), 1–6 (1989).
  15. H. M. Weissman, “Epoxy replication of optics,” Opt. Eng. 15, 435–441 (1976).
  16. D. Armitage, J. I. Thackara, W. D. Eades, M. A. Stiller, W. W. Anderson, “Fast nematic liquid crystal spatial light modulator,” in Advances in Nonlinear Polymers and Inorganic Crystals, Liquid Crystals and Laser Media, S. Musikant, ed., Proc. Soc. Photo-Opt. Instrum. Eng.824, 34–44 (1987).
  17. G. Gheen, W. W. Washwell, D. Armitage, “The effect of filter pixelation on optical correlation,” in Spatial Light Modulators and Applications, vol. 14 of OSA 1990 Technical Digest Series (Optical Society of America, Washington, D.C., 1990), pp. 161–164.
  18. S. D. Lindell, D. L. Flannery, “Ternary phase-amplitude filters for character recognition,” in Optical Information Processing Systems and Architectures, B. Javidi, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1151, 174–182 (1989).
  19. W. J. A. M. Hartmann, “Ferroelectric liquid crystal video display,” in International Display Research Conference Proceedings (Institute of Electrical and Electronics Engineers, New York, 1988), pp. 191–194.
  20. D. Armitage, J. I. Thackara, W. D. Eades, “Photoad-dressed liquid crystal spatial light modulators,” Appl. Opt. 28, 4763–4771 (1989).
  21. S. T. Lagerwall, N. A. Clark, J. Dijon, J. F. Clerc, “Ferroelectric liquid crystals: the development of devices,” Ferroelectrics 94, 3–62 (1989).

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