A thin-film spatial light modulator that uses an epitaxial film of Bi12SiO20 has been developed. By using a thin epitaxial film as a sensing, storing, and modulating layer, we can attain high resolution of 27 line pairs/mm at 50% modulation. In addition, a novel device structure that adopts a low resistivity substrate enables this device to be erased quickly only by bias voltage switching.
© 1992 Optical Society of America
Yasuyuki Nagao, Haruhisa Sakata, and Yoshinori Mimura, "Bi12SiO20 thin-film spatial light modulator," Appl. Opt. 31, 3966-3970 (1992)