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Applied Optics

Applied Optics


  • Vol. 31, Iss. 22 — Aug. 1, 1992
  • pp: 4482–4487

Simultaneous measurement of the refractive index and thickness of thin films by S-polarized reflectances

Tami Kihara and Kiyoshi Yokomori  »View Author Affiliations

Applied Optics, Vol. 31, Issue 22, pp. 4482-4487 (1992)

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We have developed an innovation of the polarized reflectances measurement technique for thickness and index (PRETTI) method, PRETTI-S, which is a simple and accurate technique to obtain the refractive index n and thickness d of a thin film by using S-polarized and P-polarized reflectances measured at oblique angles of incidence. In the PRETTI-S method, the n and d are determined by using only S-polarized reflectances. Therefore, the measurement and numerical procedure to extract the n and d are simpler than the conventional PRETTI method. As an example, measurement of a single-layer film (SiO2/Si) is carried out and excellent confirmation is obtained.

© 1992 Optical Society of America

Original Manuscript: March 15, 1991
Published: August 1, 1992

Tami Kihara and Kiyoshi Yokomori, "Simultaneous measurement of the refractive index and thickness of thin films by S-polarized reflectances," Appl. Opt. 31, 4482-4487 (1992)

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