Abstract
The relevance of the type of atmosphere used during the annealing of proton-exchanged LiNbO3 planar waveguides is discussed. The experimental evidence, based on a comparison of the refractive-index profiles of waveguides annealed under wet O2, dry O2, or ambient atmospheres, with various gas flow rates, suggests that the atmosphere type does not influence the properties of the resulting waveguide.
© 1992 Optical Society of America
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