A ray-tracing program designed for grating couplers has been used for an extensive analysis of production tolerances for a focusing grating coupler. In addition the program permits the calculation of coupler behavior in a wave-optical approach including the effects of transverse and axial intensity variations across the grating. The effects of the lateral and longitudinal source point position, wavelength, and waveguide effective index have been studied. The results indicate clearly that in many applications the laser wavelength is the most critical parameter.
© 1992 Optical Society of America
Andreas Dorsel, Herbert Gross, and Alfred Reule, "Estimation of production tolerances for a focusing grating coupler," Appl. Opt. 31, 5158-5166 (1992)