A reading head empolying a double grating in a monomode waveguide for the interferometric readout of grating scales is proposed and demonstrated. A theoretical analysis employing a ray-tracing programthat includes wave-front data output shows promising insensitivity to deviations from the design data for this device. Experimental results for a laboratory setup are presented.
© 1992 Optical Society of America
Bernd Geh and Andreas Dorsel, "Integrated optical grating scale readout employing a double grating," Appl. Opt. 31, 5241-5245 (1992)