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Integration of a curved hybrid waveguide lens and photodetector array in a GaAs waveguide

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Abstract

For the first time, we believe, the integration of a waveguide lens and a photodetector array in GaAs for operation at a 1.3-μm wavelength is reported. The waveguide lens is a newly devised curved hybrid Fresnel/Bragg chirp grating lens fabricated by the ion-million technique. Desirable performance characteristics, including high throughput efficiency, freedom from coma (up to ±4 deg off axis), and a near-diffraction-limited focal-spot size, have been demonstrated with this curved hybrid lens. The 10-element photodetector array of the InGaAs photoconducting type shows a measured gain–bandwidth product that is higher than 1 GHz at high frequency, while at a lower frequency the gain is in the range of several thousands. The curved-hybrid-lens–photodetector array combination realized in the GaAs 5 × 13 mm2 in size has produced a well-resolved element spacing of 10 μm with cross talk that is lower than −14 dB. This lens–photodetector array combination constitutes a basic structure for the realization of monolithic acousto-optic and electro-optic circuits such as integrated-optic rf spectrum analyzers and multiport switches.

© 1992 Optical Society of America

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