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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 31, Iss. 25 — Sep. 1, 1992
  • pp: 5388–5390

Fabrication of microlenses by laser-induced vaporization

Hideki Suda and Mitsugu Hanabusa  »View Author Affiliations


Applied Optics, Vol. 31, Issue 25, pp. 5388-5390 (1992)
http://dx.doi.org/10.1364/AO.31.005388


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Abstract

Three-dimensional microlenses were fabricated on a quartz substrate by evaporating a quartz target with a focused CO2 laser beam. The size and shape of the deposit were determined primarily by a mask placed in front of the substrate. The spherical thickness profile required for a lens was obtained by adjusting the gas pressure in the cell. The lens was typically 0.25 mm in diameter with a focal length of 8 mm. The present method is particularly suited for fabrication of microlens arrays, and as a demonstration a 3 × 5 array was produced.

© 1992 Optical Society of America

History
Original Manuscript: August 23, 1991
Published: September 1, 1992

Citation
Hideki Suda and Mitsugu Hanabusa, "Fabrication of microlenses by laser-induced vaporization," Appl. Opt. 31, 5388-5390 (1992)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-31-25-5388

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