Three-dimensional microlenses were fabricated on a quartz substrate by evaporating a quartz target with a focused CO2 laser beam. The size and shape of the deposit were determined primarily by a mask placed in front of the substrate. The spherical thickness profile required for a lens was obtained by adjusting the gas pressure in the cell. The lens was typically 0.25 mm in diameter with a focal length of 8 mm. The present method is particularly suited for fabrication of microlens arrays, and as a demonstration a 3 × 5 array was produced.
© 1992 Optical Society of America
Original Manuscript: August 23, 1991
Published: September 1, 1992
Hideki Suda and Mitsugu Hanabusa, "Fabrication of microlenses by laser-induced vaporization," Appl. Opt. 31, 5388-5390 (1992)