Fabrication of microlenses by laser-induced vaporization
Applied Optics, Vol. 31, Issue 25, pp. 5388-5390 (1992)
http://dx.doi.org/10.1364/AO.31.005388
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Abstract
Three-dimensional microlenses were fabricated on a quartz substrate by evaporating a quartz target with a focused CO2 laser beam. The size and shape of the deposit were determined primarily by a mask placed in front of the substrate. The spherical thickness profile required for a lens was obtained by adjusting the gas pressure in the cell. The lens was typically 0.25 mm in diameter with a focal length of 8 mm. The present method is particularly suited for fabrication of microlens arrays, and as a demonstration a 3 × 5 array was produced.
© 1992 Optical Society of America
Citation
Hideki Suda and Mitsugu Hanabusa, "Fabrication of microlenses by laser-induced vaporization," Appl. Opt. 31, 5388-5390 (1992)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-31-25-5388
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