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Applied Optics

Applied Optics


  • Vol. 31, Iss. 25 — Sep. 1, 1992
  • pp: 5388–5390

Fabrication of microlenses by laser-induced vaporization

Hideki Suda and Mitsugu Hanabusa  »View Author Affiliations

Applied Optics, Vol. 31, Issue 25, pp. 5388-5390 (1992)

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Three-dimensional microlenses were fabricated on a quartz substrate by evaporating a quartz target with a focused CO2 laser beam. The size and shape of the deposit were determined primarily by a mask placed in front of the substrate. The spherical thickness profile required for a lens was obtained by adjusting the gas pressure in the cell. The lens was typically 0.25 mm in diameter with a focal length of 8 mm. The present method is particularly suited for fabrication of microlens arrays, and as a demonstration a 3 × 5 array was produced.

© 1992 Optical Society of America

Original Manuscript: August 23, 1991
Published: September 1, 1992

Hideki Suda and Mitsugu Hanabusa, "Fabrication of microlenses by laser-induced vaporization," Appl. Opt. 31, 5388-5390 (1992)

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  1. M. Kubo, M. Hanabusa, “Fabrication of microlenses by laser chemical vapor deposition,” Appl. Opt. 29, 2755–2759 (1990). [CrossRef] [PubMed]
  2. A. Sugimura, Y. Fukuda, M. Hanabusa, “Selective area deposition of silicon-nitride and silicon-oxide by laser chemical vapor deposition and fabrication of microlenses,” J. Appl. Phys. 62, 3222–3227 (1987). [CrossRef]
  3. M. Hanabusa, “Photoinduced deposition of thin films,” Mater. Sci. Rep. 2, 51–98 (1987). [CrossRef]

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