To maximize the efficiency of dielectric diffractive optical elements, we optimized the local groove shape using the rigorous diffraction theory of multilevel surface-relief gratings.
© 1992 Optical Society of America
Original Manuscript: February 4, 1992
Published: October 1, 1992
Eero Noponen, Jari Turunen, and Antti Vasara, "Parametric optimization of multilevel diffractive optical elements by electromagnetic theory," Appl. Opt. 31, 5910-5912 (1992)