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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 31, Iss. 3 — Jan. 20, 1992
  • pp: 387–396

Spatial coherence of KrF excimer lasers

Shintaro Kawata, Ikuo Hikima, Yutaka Ichihara, and Shuntaro Watanabe  »View Author Affiliations


Applied Optics, Vol. 31, Issue 3, pp. 387-396 (1992)
http://dx.doi.org/10.1364/AO.31.000387


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Abstract

The spatial coherence and the beam divergence at 248 nm of a KrF excimer laser were obtained experimentally. These results are in good agreement with the theoretical calculations based on a simple pulse-laser model and the van Cittert–Zernike theorem. The relation between the spatial coherence and the beam divergence was obtained theoretically and supported by experimental results. This expression is given as a function of the wavelength of the laser but includes no parameters related to the laser structure. It is shown that these theoretical results are applicable to various kinds of pulse laser.

© 1992 Optical Society of America

History
Original Manuscript: March 6, 1990
Published: January 20, 1992

Citation
Shintaro Kawata, Ikuo Hikima, Yutaka Ichihara, and Shuntaro Watanabe, "Spatial coherence of KrF excimer lasers," Appl. Opt. 31, 387-396 (1992)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-31-3-387


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