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Applied Optics

Applied Optics


  • Vol. 31, Iss. 31 — Nov. 1, 1992
  • pp: 6765–6771

Surface-profile reconstruction using reflection differential phase-contrast microscopy

M. R. Atkinson, A. E. Dixon, and S. Damaskinos  »View Author Affiliations

Applied Optics, Vol. 31, Issue 31, pp. 6765-6771 (1992)

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The use of optical differential phase-contrast microscopy to obtain the surface profile of samples is outlined. The range of accurate feature height determination was calculated as a function of steepness of the side of the feature. Heights of thin features (height <0.1 μm) were accurately determined experimentally. Sample tilting and oblique stage scanning were required in order to determine the heights of thicker samples. Reconstructed profile heights were measured as a function of defocus.

© 1992 Optical Society of America

Original Manuscript: September 6, 1991
Published: November 1, 1992

M. R. Atkinson, A. E. Dixon, and S. Damaskinos, "Surface-profile reconstruction using reflection differential phase-contrast microscopy," Appl. Opt. 31, 6765-6771 (1992)

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