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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 31, Iss. 31 — Nov. 1, 1992
  • pp: 6765–6771

Surface-profile reconstruction using reflection differential phase-contrast microscopy

M. R. Atkinson, A. E. Dixon, and S. Damaskinos  »View Author Affiliations


Applied Optics, Vol. 31, Issue 31, pp. 6765-6771 (1992)
http://dx.doi.org/10.1364/AO.31.006765


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Abstract

The use of optical differential phase-contrast microscopy to obtain the surface profile of samples is outlined. The range of accurate feature height determination was calculated as a function of steepness of the side of the feature. Heights of thin features (height <0.1 μm) were accurately determined experimentally. Sample tilting and oblique stage scanning were required in order to determine the heights of thicker samples. Reconstructed profile heights were measured as a function of defocus.

© 1992 Optical Society of America

History
Original Manuscript: September 6, 1991
Published: November 1, 1992

Citation
M. R. Atkinson, A. E. Dixon, and S. Damaskinos, "Surface-profile reconstruction using reflection differential phase-contrast microscopy," Appl. Opt. 31, 6765-6771 (1992)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-31-31-6765


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References

  1. J. B. DeVelis, G. O. Reynolds, Theory and Applications of Holography (Addison-Wesley, Reading, Mass., 1967), pp. 161–162.
  2. R. A. Sprague, B. J. Thompson, “Quantitative visualization of large phase objects,” Appl. Opt. 11, 1469–1479 (1972). [CrossRef] [PubMed]
  3. R. J. Whitefield, “Noncontact optical profilometer,” Appl. Opt. 14, 2480–2485 (1975). [CrossRef] [PubMed]
  4. G. M. Robinson, D. M. Perry, R. W. Peterson, “Optical interferometry of surfaces,” Sci. Am. 265(7), 66–71 (July1991). [CrossRef]
  5. D. Kermisch, “Visualization of large variation phase objects,” in Image Processing, J. C. Urbach, ed. Proc. Soc. Photo-Opt. Instrum. Eng.74, 126–129 (1976).
  6. N. H. Dekkers, H. de Lang, “Differential phase contrast in a STEM,” Optik 41, 452–456 (1974).
  7. N. H. Dekkers, H. de Lang, “A detection method for producing phase and amplitude images simultaneously in a scanning transmission electron microscope,” Philips Tech. Rev. 37, 1–9 (1977).
  8. D. K. Hamilton, T. Wilson, “Two-dimensional phase imaging in the scanning optical microscope,” Appl. Opt. 23, 348–352 (1984). [CrossRef] [PubMed]
  9. D. K. Hamilton, T. Wilson, “Edge enhancement in scanning optical microscopy by differential detection,” J. Opt. Soc. Am. A. 1, 322–323 (1984). [CrossRef]
  10. J. P. H. Benschop, “Phase detection using scanning optical microscopy,” in Integrated Circuit Metrology, Inspection, and Process Control II, K. M. Monahan, ed. Proc. Soc. Photo-Opt. Instrum. Eng.921, 123–130 (1988).
  11. A. E. Dixon, S. Damaskinos, M. R. Atkinson, “A new transmission and double reflection scanning beam confocal microscope: applications in transmission,” in Scanning Microscopy Instrumentation, Proc. Soc. Photo-Opt. Instrum. Eng. 1556, 144–153 (1992).
  12. M. R. Atkinson, “Confocal microscopy applied to metrology of integrated circuits,” Ph.D. dissertation (University of Waterloo, Waterloo, Ontario N2L 3G1, Canada, 1991).

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