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Applied Optics

Applied Optics


  • Vol. 31, Iss. 34 — Dec. 1, 1992
  • pp: 7242–7248

Differential type of phase-locked laser diode interferometer free from external disturbance

Takamasa Suzuki, Osami Sasaki, Katsuhiro Higuchi, and Takeo Maruyama  »View Author Affiliations

Applied Optics, Vol. 31, Issue 34, pp. 7242-7248 (1992)

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A phase-locked laser diode interferometer with differential detection to eliminate external disturbance is proposed. In this interferometer, the measurements are implemented at two different points at the same time. The surface profile that contains the disturbance is obtained at the scanned measuring point, and the disturbance is obtained at the fixed measuring point. The exact profile is obtained by subtracting the latter from the former. The limitations and characteristics are examined theoretically. The analytical results agree well with the experimental results. The repeated measurement accuracy is estimated to be ~5 nm in this interferometer.

© 1992 Optical Society of America

Original Manuscript: September 10, 1991
Published: December 1, 1992

Takamasa Suzuki, Osami Sasaki, Katsuhiro Higuchi, and Takeo Maruyama, "Differential type of phase-locked laser diode interferometer free from external disturbance," Appl. Opt. 31, 7242-7248 (1992)

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  1. K. Tatsuno, Y. Tsunoda, “Diode laser direct modulation heterodyne interferometer,” Appl. Opt. 26, 37–40 (1987). [CrossRef] [PubMed]
  2. Y. Ishii, J. Chen, K. Murata, “Digital phase-measuring interferometry with a tunable laser diode,” Opt. Lett. 12, 233–235 (1987). [CrossRef] [PubMed]
  3. J. Chen, Y. Ishii, K. Murata, “Heterodyne interferometry with a frequency-modulated laser diode,” Appl. Opt. 27, 124–128 (1988). [CrossRef] [PubMed]
  4. T. Yoshino, M. Nara, S. Mnatzakanian, B. S. Lee, T. C. Strand, “Laser diode feedback interferometer for stabilization and displacement measurements,” Appl. Opt. 26, 892–897 (1987). [CrossRef] [PubMed]
  5. O. Sasaki, K. Takahashi, T. Suzuki, “Sinusoidal phase modulating laser diode interferometer with a feedback control system to eliminate external disturbance,” Opt. Eng. 29, 1511–1515 (1990). [CrossRef]
  6. T. Suzuki, O. Sasaki, T. Maruyama, “Phase locked laser diode interferometry for surface profile measurement,” Appl. Opt. 28, 4407–4410 (1989). [CrossRef] [PubMed]
  7. T. Suzuki, O. Sasaki, K. Higuchi, T. Maruyama, “Phase-locked laser diode interferometer: high-speed feedback control system,” Appl. Opt. 30, 3622–3626 (1991). [CrossRef] [PubMed]
  8. D. T. Moore, R. P. Murray, F. B. Neves, “Large aperture ac interferometer for optical testing,” Appl. Opt. 17, 3959–3963 (1978). [CrossRef] [PubMed]
  9. G. W. Johnson, D. C. Leiner, D. T. Moore, “Phase-locked interferometry,” Opt. Eng. 18, 46–52 (1979).
  10. H. J. Matthews, D. K. Hamilton, C. J. R. Sheppard, “Surface profiling by phase-locked interferometry,” Appl. Opt. 25, 2372–2374 (1986). [CrossRef] [PubMed]
  11. O. Sasaki, H. Okazaki, “Sinusoidal phase modulating interferometry for surface profile measurement,” Appl. Opt. 25, 3137–3140 (1986). [CrossRef] [PubMed]
  12. O. Sasaki, H. Okazaki, “Analysis of measurement accuracy in sinusoidal phase modulating interferometry,” Appl. Opt. 25, 3152–3158 (1986). [CrossRef] [PubMed]
  13. O. Sasaki, H. Okazaki, M. Sakai, “Sinusoidal phase modulating interferometer using the integrating-bucket method,” Appl. Opt. 26, 1089–1093 (1987). [CrossRef] [PubMed]

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