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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 31, Iss. 34 — Dec. 1, 1992
  • pp: 7242–7248

Differential type of phase-locked laser diode interferometer free from external disturbance

Takamasa Suzuki, Osami Sasaki, Katsuhiro Higuchi, and Takeo Maruyama  »View Author Affiliations


Applied Optics, Vol. 31, Issue 34, pp. 7242-7248 (1992)
http://dx.doi.org/10.1364/AO.31.007242


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Abstract

A phase-locked laser diode interferometer with differential detection to eliminate external disturbance is proposed. In this interferometer, the measurements are implemented at two different points at the same time. The surface profile that contains the disturbance is obtained at the scanned measuring point, and the disturbance is obtained at the fixed measuring point. The exact profile is obtained by subtracting the latter from the former. The limitations and characteristics are examined theoretically. The analytical results agree well with the experimental results. The repeated measurement accuracy is estimated to be ~5 nm in this interferometer.

© 1992 Optical Society of America

History
Original Manuscript: September 10, 1991
Published: December 1, 1992

Citation
Takamasa Suzuki, Osami Sasaki, Katsuhiro Higuchi, and Takeo Maruyama, "Differential type of phase-locked laser diode interferometer free from external disturbance," Appl. Opt. 31, 7242-7248 (1992)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-31-34-7242

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