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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 31, Iss. 34 — Dec. 1, 1992
  • pp: 7344–7347

Differential optical microscopy based on higher-order Gaussian–Hermite beam patterns

P. Chrusch, Jr. and M. Vaez-Iravani  »View Author Affiliations


Applied Optics, Vol. 31, Issue 34, pp. 7344-7347 (1992)
http://dx.doi.org/10.1364/AO.31.007344


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Abstract

A new method for performing scanning differential optical microscopy is described. This method is based on the use of a higher-order transverse mode of a laser. The technique is capable of responding to both amplitude and phase structures on the object. The sensitivity of the system in detecting differential object phase structures is similar to that of a dc scanning Nomarski microscope. The system is employed to image the surface structure of an integrated circuit.

© 1992 Optical Society of America

History
Original Manuscript: January 30, 1992
Published: December 1, 1992

Citation
P. Chrusch and M. Vaez-Iravani, "Differential optical microscopy based on higher-order Gaussian–Hermite beam patterns," Appl. Opt. 31, 7344-7347 (1992)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-31-34-7344

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