We use a backdiffracted beam from a grating to establish accurately ellipsometric angles of incidence in configurations where samples cannot be accessed directly.
© 1992 Optical Society of America
Original Manuscript: April 16, 1991
Published: February 1, 1992
W. E. Quinn, B. P. Van der Gaag, L. M. Schiavone, and D. E. Aspnes, "Grating method for determining the absolute angle of incidence of ellipsometric samples in remote locations," Appl. Opt. 31, 426-427 (1992)