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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 31, Iss. 4 — Feb. 1, 1992
  • pp: 471–478

Infrared ellipsometer for the study of surfaces, thin films, and superlattices

J. Bremer, O. Hunderi, Kong Fanping, T. Skauli, and E. Wold  »View Author Affiliations


Applied Optics, Vol. 31, Issue 4, pp. 471-478 (1992)
http://dx.doi.org/10.1364/AO.31.000471


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Abstract

An automatic infrared ellipsometer for the study of surface and interface phenomena has been constructed. The system is based on a Fourier transform spectrometer that we equipped with an ellipsometer unit. Polarizers and analyzers are of the ion-etched wire-grid type. Their rotation is governed by means of a computer-controlled stepping-motor system. A discussion of calibration procedures for the infrared range is given, and special attention is given to the problem of selecting the best measurement strategy. The polarization state of the reflected beam is determined by measuring the intensity at 72 regularly spaced polarizer/analyzer settings. It is found that the effects of interferometric polarization, beam wandering, and detector dichroism cannot be neglected. However, these error sources have been eliminated by analyzing the zeroth, second, and fourth harmonic components of the azimuthally recorded intensity. Both the multiplex advantage of Fourier transform spectroscopy and the phase sensitivity of ellipsometry are combined in this instrument. Measurements on superconducting films, superlattices, and doped GaAs films are reported.

© 1992 Optical Society of America

History
Original Manuscript: February 25, 1991
Published: February 1, 1992

Citation
J. Bremer, O. Hunderi, Kong Fanping, T. Skauli, and E. Wold, "Infrared ellipsometer for the study of surfaces, thin films, and superlattices," Appl. Opt. 31, 471-478 (1992)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-31-4-471


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References

  1. J. R. Beattie, “Optical constants of metals in the infrared—experimental methods,” Philos. Mag. 46, 235–245 (1955).
  2. O. Hunderi, J. Jensen, “Fourier-transform infrared ellipsometer for liquid crystal characterization,” SINTEF Rep. STF 34F84108 (SINTEF, Trondheim, Norway, 1984).
  3. M. J. Dignam, M. O. Baker, “Analysis of a polarizing Michelson interferometer,” Appl. Spectrosc. 35, 186–193 (1981). [CrossRef]
  4. A. Röseler, “Spectroscopic ellipsometry in the infrared,” Infrared Phys. 21, 349–353 (1981). [CrossRef]
  5. A. Röseler, “Spectroscopic infrared-ellipsometry with the Fourier-transform-spectrometer,” Preprint 85–4 (Zentralinstitut für Optik und Spectroskopie, Berlin, 1985).
  6. B. Drevillon, “Spectroscopic ellipsometry of ultrathin films: from UV to IR,” Thin Solid Films 163, 157–166 (1988). [CrossRef]
  7. D. L. Allara, J. D. Swalen, “An infrared reflection spectroscopy study of oriented cadmium arachidate monolayer films on evaporated silver,” J. Phys. Chem. 86, 2700–2704 (1982). [CrossRef]
  8. A. E. Dowrey, C. Marcott, “Approach to studying adsorbates on metal surfaces,” Appl. Spectrosc. 36, 414–416 (1982). [CrossRef]
  9. D. L. Allara, A. Raca, C. A. Pryde, “Distortions of band shapes in external reflection infrared spectra of thin polymer films on metal substrates,” Macromolecules 11, 1215–1220 (1978). [CrossRef]
  10. B. Jasse, J. L. Koenig, “Orientational measurements in polymers using vibrational spectroscopy,” J. Macromol. Sci. Rev. Macromol. Chem. C 17, 61–135 (1979). [CrossRef]
  11. F. Ferrieu, “Infrared spectroscopic ellipsometry using a Fourier transform infrared spectrometer: some applications in thin-film characterization,” Rev. Sci. Instrum. 60, 3212–3216 (1989). [CrossRef]
  12. J. Bremer, O. Hunderi, Fanping, “Ellipsometric characterization of thin films and superlattices,” Mater. Sci. Eng. B 5, 285–289 (1990). [CrossRef]
  13. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light, (North-Holland, Amsterdam, 1977).
  14. H. G. Liljenwall, A. G. Mathewson, “Two alignment methods for the polarizer and analyzer in an ellipsometer,” GIPR-028 (Department of Physics, Chalmers University of Technology, Gothenburg, Sweden, 1970).
  15. A. L. Fymat, “Polarization effects in Fourier spectroscopy. I: Coherency matrix representation,” Appl. Opt. 11, 160–173 (1972). [CrossRef] [PubMed]
  16. K. Leonhardt, “Gütezahlen und Gütefunktionen für Strahlenteiler und praktische Berechnung von Jonesmatrizen in Zweistrahlinterferometern,” Optik 36, 529–546 (1972).

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