OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 31, Iss. 4 — Feb. 1, 1992
  • pp: 485–487

Separation by ion implantation of oxygen (SIMOX) structures: estimating thicknesses

J. F. Marchiando and Jon Geist  »View Author Affiliations


Applied Optics, Vol. 31, Issue 4, pp. 485-487 (1992)
http://dx.doi.org/10.1364/AO.31.000485


View Full Text Article

Acrobat PDF (306 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The propagation of errors in the model parameters is compared for cases that analyze a simple separation by ion implantation of oxygen structure by using reflectometry and ellipsometry. Both methods give comparable values for the layer thicknesses. Both the radius of convergence and the values of uncertainty tend to be larger with reflectometry than with ellipsometry.

© 1992 Optical Society of America

History
Original Manuscript: November 5, 1990
Published: February 1, 1992

Citation
J. F. Marchiando and Jon Geist, "Separation by ion implantation of oxygen (SIMOX) structures: estimating thicknesses," Appl. Opt. 31, 485-487 (1992)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-31-4-485

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited