OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 31, Iss. 9 — Mar. 20, 1992
  • pp: 1304–1313

Light scattering from the volume of optical thin films: theory and experiment

Samer Kassam, Angela Duparré, Karl Hehl, Peter Bussemer, and Jakob Neubert  »View Author Affiliations


Applied Optics, Vol. 31, Issue 9, pp. 1304-1313 (1992)
http://dx.doi.org/10.1364/AO.31.001304


View Full Text Article

Enhanced HTML    Acrobat PDF (1113 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A theoretical model is presented that describes the volume scattering in thin optical films, particularly in typical columnar structures. It is based on a first-order perturbation theory that concerns the fluctuation of the dielectric permittivity in the film. For evaporated PbF2 films that show a pronounced columnar morphology, angular as well as total integrated scattering measurements at λ = 633 nm have been performed on a special layer design to suppress roughness-induced scattering. A comparison of the predicted theoretical and the measured experimental values leads to such structural parameters as packing density and the evolutionary exponent of the columns.

© 1992 Optical Society of America

History
Original Manuscript: June 26, 1990
Published: March 20, 1992

Citation
Samer Kassam, Angela Duparré, Karl Hehl, Peter Bussemer, and Jakob Neubert, "Light scattering from the volume of optical thin films: theory and experiment," Appl. Opt. 31, 1304-1313 (1992)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-31-9-1304


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. J. M. Bennett, “Optical scattering and absorption losses at interfaces and in thin films,” Thin Solid Films 123, 27–44 (1985). [CrossRef]
  2. J. Ebert, H. Pannhorst, H. Küster, H. Welling, “‘Scatter losses of broadband interference coatings,” ’ Appl. Opt. 18, 818–822 (1979). [CrossRef] [PubMed]
  3. L. Mattsson, “Light scattering and characterization of thin films,” in Thin Film Technologies II, J. R. Jacobsson, ed., Proc. Soc. Photo-Opt. Instrum. Eng.652, 215–222 (1986).
  4. G. A. Al-Jumaily, J. J. McNally, J. R. McNeil, W. C. Herrmann, “Effect of ion assisted deposition on optical scatter and surface microstructure of thin films,” J. Vac. Sci. Technol. A 3, 651–655 (1985). [CrossRef]
  5. C. Amra, P. Roche, E. Pelletier, “Interface roughness cross-correlation laws deduced from scattering diagram measurements on optical multilayers: effect of material grain size,” J. Opt. Soc. Am. B 4, 1087–1093 (1987). [CrossRef]
  6. A. Duparré, R. Dohle, H. Müller, “Relation between light scattering and morphology of columnar structured optical thin films,” J. Mod. Opt. 37, 1383–1390 (1990). [CrossRef]
  7. E. Pelletier, P. Roche, C. Grèzes-Besset, “Measurement of scattering curves of coated or uncoated surfaces: experimental techniques for determining surface roughness,” in Surface Measurement and Characterization, J. M. Bennett, ed., Proc. Soc. Photo-Opt. Instrum. Eng.1009, 98–110 (1988).
  8. A. Duparré, H.-G. Walter, “Surface smoothing and roughening by dielectric thin film deposition,” Appl. Opt. 27, 1393–1395 (1988). [CrossRef] [PubMed]
  9. A. Roos, M. Bergkvist, C.-R. Ribbing, “Optical scattering from oxidized metals. 1: Model formulation and properties,” Appl. Opt. 28, 1360–1364 (1989). [CrossRef] [PubMed]
  10. J. M. Elson, “Infrared light scattering from surfaces covered with multiple dielectric overlayers,” Appl. Opt. 16, 2872–2881 (1977). [CrossRef] [PubMed]
  11. P. Bousquet, F. Flory, P. Roche, “Scattering from multilayer thin films: theory and experiment,” J. Opt. Soc. Am. 71, 1115–1123 (1981). [CrossRef]
  12. C. K. Carniglia, “Scalar scattering theory for multilayer optical coatings,” Opt. Eng. 18, 104–114 (1979). [CrossRef]
  13. J. M. Elson, “Theory of light scattering from a rough surface with an inhomogeneous dielectric permittivity,” Phys. Rev. B 30, 5460–5480 (1984). [CrossRef]
  14. K. H. Guenther, “Microstructure of vapor-deposited optical coatings,” Appl. Opt. 23, 3806–3816 (1984). [CrossRef] [PubMed]
  15. B. A. Movchan, A. V. Demchishin, “Study of the structure and properties of thin vacuum condensates of nickel, titanium, tungsten, aluminium oxide and zirconium dioxide,” Fiz. Met. Metalloved. 28, 653–660 (1969).
  16. M. Born, E. Wolf, Principles of Optics (Pergamon, New York, 1964), Chap. 1.6
  17. A. A. Maradudin, D. L. Mills, “Scattering and absorption of electromagnetic radiation by a semi-infinite medium in the presence of surface roughness,” Phys. Rev. B 11, 1392–1415 (1975). [CrossRef]
  18. A. Duparré, E. Welsch, H.-G. Walther, N. Kaiser, H. Müller, E. Hacker, H. Lauth, J. Meyer, P. Weissbrodt, “Structure-related bulk losses in ZrO2 optical thin films,” Thin Solid Films 187, 275–288 (1990). [CrossRef]
  19. A. Duparré, S. Kassam, Verfahren zur Bestimmung der Volumenstreuung von transparenten, insbesondere optischen Schichten, German PatentG01N/3407553 (17May1990).
  20. J. Neubert, “Beitrag zur Untersuchung der Grenzflächen-Korrelationseigen-schaften dünner optischer Schichten nach der Streulichtmethode,” Ph.D. dissertation (University of Jena, Jena, Germany, 1991).
  21. A. Duparré, C.-P. Darr, G. Schirmer, H. Truckenbrodt, M. Weiss, “The influence of angle limitation in light scattering measurements on the determination of the reflectance of multilayer dielectric mirrors,” Optik 72, 153–156 (1986).
  22. R. Messier, “Toward quantification of thin film morphology,” J. Vac. Sci. Technol. A 4, 496–499 (1986). [CrossRef]
  23. P. Bussemer, K. Hehl, S. Kassam, “Theory of light scattering from rough surfaces and interfaces and from volume inhomogeneities in an optical layer stack,” Waves Random Media (to be published).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited