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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 32, Iss. 13 — May. 1, 1993
  • pp: 2339–2344

Ellipsometry algorithm for absorbing films

Frank K. Urban  »View Author Affiliations


Applied Optics, Vol. 32, Issue 13, pp. 2339-2344 (1993)
http://dx.doi.org/10.1364/AO.32.002339


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Abstract

Easy sample preparation and measurement makes ellipsometry attractive for surface and film investigations; however, specialized numerical methods are normally required to relate measurements to unknown physical attributes of reflecting surfaces. Although solution techniques have been developed, the problem of data analysis is by no means solved. This paper presents an alternative method for computation of the thickness and optical properties of an absorbing film overlying a known substrate from ellipsometer data obtained at two light incidence angles. Tests for selected cases required no a priori knowledge of the film, in contrast to other methods.

© 1993 Optical Society of America

History
Original Manuscript: February 13, 1992
Published: May 1, 1993

Citation
Frank K. Urban, "Ellipsometry algorithm for absorbing films," Appl. Opt. 32, 2339-2344 (1993)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-32-13-2339

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