A concave diffraction grating (2400 grooves/mm) coated with a Si/Mo multilayer has an efficiency of 2.5% at 290 Å and a resolving power of 14,000 in third order of 156 Å.
© 1993 Optical Society of America
M. P. Kowalski, J. F. Seely, W. R. Hunter, J. C. Rife, T. W. Barbee, Jr., G. E. Holland, C. N. Boyer, C. M. Brown, and R. G. Cruddace, "Dual-waveband operation of a multilayer-coated diffraction grating in the soft x-ray range at near-normal incidence," Appl. Opt. 32, 2422-2425 (1993)