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Applied Optics

Applied Optics


  • Vol. 32, Iss. 14 — May. 10, 1993
  • pp: 2519–2525

Multilevel-grating array generators: fabrication error analysis and experiments

J. Michael Miller, Mohammad R. Taghizadeh, Jari Turunen, and Neil Ross  »View Author Affiliations

Applied Optics, Vol. 32, Issue 14, pp. 2519-2525 (1993)

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The effects of mask alignment and etch-depth errors in the array uniformity error U and diffraction efficiency η of multilevel-grating array illuminators are evaluated numerically. Also demonstrated are 16-level fan-out elements with array size up to 32 × 16, with U = 5%–10% and η = 83%–92%. These are fabricated with electron-beam-written binary masks, optical alignment and contact copying, and reactive ion etching. Good agreement between the predictions of the error analysis and the performance of the fabricated components is observed.

© 1993 Optical Society of America

Original Manuscript: July 14, 1992
Published: May 10, 1993

J. Michael Miller, Mohammad R. Taghizadeh, Jari Turunen, and Neil Ross, "Multilevel-grating array generators: fabrication error analysis and experiments," Appl. Opt. 32, 2519-2525 (1993)

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  1. M. E. Prise, N. C. Craft, R. E. LaMarche, M. M. Downs, S. J. Walker, L. A. D’Asaro, L. M. F. Chirovsky, “Module for optical logic circuits using symmetric self-electro-optic effect devices,” Appl. Opt. 29, 2164–2170 (1990). [CrossRef] [PubMed]
  2. T. J. Cloonan, M. J. Herron, F. A. P. Tooley, G. W. Richards, F. B. McCormick, E. Kerbis, J. L. Brubaker, A. L. Lentine, “An all-optical implementation of a 3-D crossover network,” IEEE Photon. Technol. Lett. 2, 438–440 (1990). [CrossRef]
  3. D. J. McKnight, I. R. Redmond, A. C. Walker, M. R. Taghizadeh, G. S. Buller, J. G. H. Mathew, S. D. Smith, “Parallel optical digital data transfer between bistable logic arrays,” Opt. Comput. Process. 1, 137–144 (1991).
  4. F. B. McCormick, F. A. P. Tooley, T. J. Cloonan, J. L. Brubaker, A. L. Lentine, R. L. Morrison, S. J. Hinterlong, M. L. Herron, S. L. Walker, J. M. Sasian, “Demonstration of cascaded operation of 2 K array of S-SEEDs,” Electron. Lett. 27, 1869–1871 (1991). [CrossRef]
  5. A. L. Lentine, F. A. P. Tooley, S. L. Walker, F. B. McCormick, R. L. Morrison, L. M. F. Chirovsky, M. W. Focht, J. M. Freund, G. D. Guth, R. E. Leibenguth, G. J. Przybylek, L. E. Smith, L. A. D’Asaro, D. A. B. Miller, “Logic self-electro-optic devices: quantum-well opto-electronic multiport logic gates, multiplexers, demultiplexers, and shift registers,” IEEE J. Quantum Electron. 28, 1539–1553 (1992). [CrossRef]
  6. N. Streibl, “Beam shaping with optical array generators,” J. Mod. Opt. 36, 1559–1573 (1989). [CrossRef]
  7. H. Dammann, K. Görtler, “High-efficiency in-line multiple imaging by means of multiple phase holograms,” Opt. Commun. 3, 312–315 (1971). [CrossRef]
  8. A. Vasara, M. R. Taghizadeh, J. Turunen, J. Westerholm, E. Noponen, H. Ichikawa, J. M. Miller, T. Jaakkola, S. Kuisma, “Binary surface-relief gratings for array illumination in digital optics,” Appl. Opt. 31, 3320–3336 (1992). [CrossRef] [PubMed]
  9. M. Ekberg, M. Larsson, S. Hård, J. Turunen, M. R. Taghizadeh, J. Westerholm, A. Vasara, “Multilevel grating array illuminators manufactured by electron-beam lithography,” Opt. Commun. 88, 37–41 (1992). [CrossRef]
  10. P. Ehbets, H. P. Herzig, D. Prongue, M. T. Gale, “High-efficiency continuous surface-relief gratings for two-dimensional array generation,” Opt. Lett. 17, 908–910 (1992). [CrossRef] [PubMed]
  11. B. Robertson, J. Turunen, H. Ichikawa, J. M. Miller, M. R. Taghizadeh, A. Vasara, “Hybrid kinoform fan-out elements in dichromated gelatin,” Appl. Opt. 30, 3711–3720 (1991). [CrossRef] [PubMed]
  12. E. Tervonen, A. T. Friberg, J. Westerholm, J. Turunen, M. R. Taghizadeh, “Programmable optical interconnections by multilevel synthetic acousto-optic holograms,” Opt. Lett. 16, 1274–1276 (1991). [CrossRef] [PubMed]
  13. D. W. Prather, J. N. Mait, “Acousto-optic generation of two-dimensional spot arrays,” Opt. Lett. 16, 1720–1722 (1991). [CrossRef] [PubMed]
  14. J. Turunen, J. Fagerholm, A. Vasara, M. Taghizadeh, “Detour-phase kinoform interconnects: the concept and fabrication considerations,” J. Opt. Soc. Am. A 7, 1202–1208 (1990). [CrossRef]
  15. S. J. Walker, J. Jahns, “Array generation with multilevel phase gratings,” J. Opt. Soc. Am. A 7, 1509–1513 (1990). [CrossRef]
  16. L. D’Auria, J. P. Huignard, A. M. Roy, E. Spitz, “Photolithographic fabrication of thin film lenses,” Opt. Commun. 5, 232–235 (1972). [CrossRef]
  17. J. Jahns, S. J. Walker, “Two-dimensional array of diffractive microlenses by thin film deposition,” Appl. Opt. 29, 931–936 (1990). [CrossRef] [PubMed]
  18. P. Long, D. Hsu, M. Wu, K. Chin, S. Gao, “Kinoform with 64 phase levels for use as an array generator,” Opt. Lett. 17, 685–687 (1992). [CrossRef]
  19. J. Turunen, A. Vasara, J. Westerholm, “Kinoform phase relief synthesis: a stochastic method,” Opt. Eng. 89, 1162–1167 (1989).
  20. A. Vasara, J. Turunen, J. Westerholm, M. R. Taghizadeh, “Stepped-phase kinoforms,” in Optics in Complex Systems, F. Lanzl, H.-J. Preuss, G. Weigelt, eds., Proc. Soc. Photo-Opt. Instrum. Eng.1319, 298–299 (1990).
  21. J. M. Miller, M. R. Taghizadeh, J. Turunen, N. Ross, E. Noponen, A. Vasara, “Kinoform array illuminators in fused silica,” J. Mod. Opt. (to be published).
  22. L. B. Lesem, P. M. Hirsch, J. A. Jordan, “The kinoform: a new wavefront reconstruction device,” IBM J. Res. Dev. 13, 150–155 (1969). [CrossRef]
  23. J. W. Goodman, Fourier Optics (McGraw-Hill, New York, 1968).
  24. R. Petit, ed., Electromagnetic Theory of Gratings (Springer-Verlag, Berlin, 1980). [CrossRef]
  25. R. L. Morrison, “Symmetries that simplify the design of spot array phase gratings,” J. Opt. Soc. Am. A 9, 464–471 (1992). [CrossRef]
  26. F. Wyrowski, “Upper bound on the diffraction efficiency of diffractive phase elements,” Opt. Lett. 16, 1915–1917 (1991). [CrossRef] [PubMed]
  27. J. A. Cox, B. Fritz, T. Werner, “Process error limitations on binary optics performance,” in Computer and Optically Generated Holographic Optics, I. Cindrich, S. H. Lee, eds., Proc. Soc. Photo-Opt. Instrum. Eng.1555, 80–88 (1991).

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