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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 32, Iss. 14 — May. 10, 1993
  • pp: 2538–2542

Application of a binary diffractive optic for beam shaping in semiconductor processing by lasers

J. Cordingley  »View Author Affiliations


Applied Optics, Vol. 32, Issue 14, pp. 2538-2542 (1993)
http://dx.doi.org/10.1364/AO.32.002538


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Abstract

Laser repair of dynamic random-access memories is commercially significant at the 1-Mbit density and larger. The window of acceptable laser parameters required to repair these parts typically decreases with each successive device generation because of increased variations in oxide thickness. A simple single-zone binary optic was developed to modify the beam profile from Gaussian to flattop. Experiments performed on actual dynamic random-access memory parts verified a large increase in the laser energy process window because of the shaped beam profile.

© 1993 Optical Society of America

History
Original Manuscript: July 1, 1992
Published: May 10, 1993

Citation
J. Cordingley, "Application of a binary diffractive optic for beam shaping in semiconductor processing by lasers," Appl. Opt. 32, 2538-2542 (1993)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-32-14-2538

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