Laser repair of dynamic random-access memories is commercially significant at the 1-Mbit density and larger. The window of acceptable laser parameters required to repair these parts typically decreases with each successive device generation because of increased variations in oxide thickness. A simple single-zone binary optic was developed to modify the beam profile from Gaussian to flattop. Experiments performed on actual dynamic random-access memory parts verified a large increase in the laser energy process window because of the shaped beam profile.
© 1993 Optical Society of America
Original Manuscript: July 1, 1992
Published: May 10, 1993
J. Cordingley, "Application of a binary diffractive optic for beam shaping in semiconductor processing by lasers," Appl. Opt. 32, 2538-2542 (1993)