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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 32, Iss. 19 — Jul. 1, 1993
  • pp: 3409–3415

Correlation between substrate preparation technique and scatter observed from optical coatings

K. C. Hickman, R. Wingler, F. L. Williams, C. E. Sobczak, C. K. Carniglia, C. F. Kranenberg, K. Jungling, J. R. McNeil, and J. P. Black  »View Author Affiliations


Applied Optics, Vol. 32, Issue 19, pp. 3409-3415 (1993)
http://dx.doi.org/10.1364/AO.32.003409


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Abstract

We present experimental evidence of the dependence of coating scatter on a substrate preparation technique for fused silica substrates. Samples included conventionally polished, superpolished, and float-polished substrates. We used scatterometry and total internal reflection microscopy to investigate the effects of substrate preparation on the performance of zirconium oxide thin films. Results indicate that scatter from coatings dominates the scatter signature of the coated optic. They also demonstrate that substrate preparation can affect the level of scatter produced in optical coatings. In addition it is observed that the substrates with the lowest scatter do not necessarily result in the coatings with the lowest scatter.

© 1993 Optical Society of America

History
Original Manuscript: August 31, 1992
Published: July 1, 1993

Citation
K. C. Hickman, R. Wingler, F. L. Williams, C. E. Sobczak, C. K. Carniglia, C. F. Kranenberg, K. Jungling, J. R. McNeil, and J. P. Black, "Correlation between substrate preparation technique and scatter observed from optical coatings," Appl. Opt. 32, 3409-3415 (1993)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-32-19-3409

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