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Applied Optics

Applied Optics


  • Vol. 32, Iss. 19 — Jul. 1, 1993
  • pp: 3416–3424

Teflon laps: some new developments and results

Achim J. Leistner  »View Author Affiliations

Applied Optics, Vol. 32, Issue 19, pp. 3416-3424 (1993)

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The process of superpolishing with Teflon laps has enabled supersmooth [<0.1 nm rms] and extremely flat (λ/100) optical surfaces to be produced on a large range of amorphous and crystalline optical materials. Stable surface conditions and the very low wear of a Teflon lap during polishing provide an opportunity to examine the effects of varying different polishing parameters. These include sample-to-lap mismatch and the influence of different polishing compounds and fluid chemistry. The results show that when large optical flats are superpolished with Teflon laps, microroughness, subsurface damage, and scattering can be minimized and reliably and consistently predicted for a wide variety of optical materials, while extremely flat surfaces are simultaneously achieved.

© 1993 Optical Society of America

Original Manuscript: October 28, 1992
Published: July 1, 1993

Achim J. Leistner, "Teflon laps: some new developments and results," Appl. Opt. 32, 3416-3424 (1993)

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