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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 32, Iss. 19 — Jul. 1, 1993
  • pp: 3442–3447

Recent developments in profiling optical surfaces

Jean M. Bennett, Virgil Elings, and Kevin Kjoller  »View Author Affiliations


Applied Optics, Vol. 32, Issue 19, pp. 3442-3447 (1993)
http://dx.doi.org/10.1364/AO.32.003442


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Abstract

To understand better the fabrication of optical surfaces and to be able to produce smoother, lower-scatter surfaces, we need to extend characterization techniques to shorter and longer surface spatial wavelengths beyond the conventional 1-μm to 1-mm region. Scanning probe microscopes are now available for profiling optical surfaces with height and lateral resolutions of a few atomic spacings. In this paper we report on measurements made with a Nanoscope II atomic force microscope on a variety of supersmooth optical surfaces and compare these results with measurements made with a conventional stylus profiling instrument. Consistent results have been obtained. To cover the long-spatial-wavelength region, long-scan profilers can be used to measure surface waviness in the range from a few millimeters to a few centimeters with height sensitivities ∼ 10 times better than conventional interferometers. The characterization of a Nanostep long-scan mechanical profiler is described, and examples of surface profiles taken on selected flat samples are given.

© 1993 Optical Society of America

History
Original Manuscript: November 5, 1992
Published: July 1, 1993

Citation
Jean M. Bennett, Virgil Elings, and Kevin Kjoller, "Recent developments in profiling optical surfaces," Appl. Opt. 32, 3442-3447 (1993)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-32-19-3442

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