It is shown that ozone generated by UV light can be used to clean carbon-contaminated synchrotronradiation optics.
© 1993 Optical Society of America
Roger W. C. Hansen, Mark Bissen, Dan Wallace, Jeff Wolske, and Tom Miller, "Ultraviolet/ozone cleaning of carbon-contaminated optics," Appl. Opt. 32, 4114-4116 (1993)