OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 32, Iss. 25 — Sep. 1, 1993
  • pp: 4852–4854

Long-term stability of a Mo/Si multilayer structure

T. W. Barbee, Jr., J. C. Rife, W. R. Hunter, M. P. Kowalski, R. G. Cruddace, and J. F. Seely  »View Author Affiliations


Applied Optics, Vol. 32, Issue 25, pp. 4852-4854 (1993)
http://dx.doi.org/10.1364/AO.32.004852


View Full Text Article

Enhanced HTML    Acrobat PDF (303 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The normal-incidence reflectance of a Mo/Si multilayer mirror, with peak reflectance near 130 Å, was measured over a period of 20 months by using synchrotron radiation. The measured reflectances were unchanged over this period of time, and this indicates that the material layers and interfaces were stable.

© 1993 Optical Society of America

History
Original Manuscript: July 23, 1992
Published: September 1, 1993

Citation
T. W. Barbee, J. C. Rife, W. R. Hunter, M. P. Kowalski, R. G. Cruddace, and J. F. Seely, "Long-term stability of a Mo/Si multilayer structure," Appl. Opt. 32, 4852-4854 (1993)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-32-25-4852


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. T. W. Barbee, S. Mrowka, M. C. Hettrick, “Molybdenum–silicon multilayer mirrors for the extreme ultraviolet,” Appl. Opt. 24, 883–886 (1985). [CrossRef] [PubMed]
  2. K. Holloway, K. B. Do, R. Sinclair, “Interfacial reactions on annealing molybdenum-silicon multilayers,” J. Appl. Phys. 65, 474–480 (1989). [CrossRef]
  3. W. R. Hunter, J. C. Rife, “An ultrahigh vacuum reflectometer/goniometer for use with synchrotron radiation,” Nucl. Instrum. Methods A 246, 465–468 (1986). [CrossRef]
  4. J. C. Rife, W. R. Hunter, R. T. Williams, “Features and initial performance tests of the grating/crystal monochromator,” Nucl. Instrum. Methods Phys. Res. A 246, 252–255 (1986); J. C. Rife, H. R. Sadeghi, W. R. Hunter, “Upgrades and recent performance of the grating/crystal monochromator,” Rev. Sci. Instrum. 60, 2064–2067 (1989). [CrossRef]
  5. B. L. Henke, J. C. Davis, E. M. Gullikson, R. C. C. Perera, “A preliminary report on x-ray photoabsorption coefficients and atomic scattering factors for 92 elements in the 10–10,000 eV region,” Lawrence Berkeley Lab. Rep. LBL-26259 (Lawrence Berkeley Laboratory, Berkeley, Calif., 1988), pp. 61–64, 175–178.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited