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Applied Optics

Applied Optics


  • Vol. 32, Iss. 28 — Oct. 1, 1993
  • pp: 5462–5474

Multiwavelength (0.45–10.6 μm) angle-resolved scatterometer or how to extend the optical window

C. Amra, D. Torricini, and P. Roche  »View Author Affiliations

Applied Optics, Vol. 32, Issue 28, pp. 5462-5474 (1993)

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An apparatus to record scattered light in whole space over a large range of visible and infrared wavelengths (0.45–10.6 μm) is described. Parasitic light, calibration, and dynamic range are discussed to point out performances and limits of the experimental setup. Angular measurements at several wavelengths give access to bidimensional roughness spectra of polished samples in different frequency bandwidths. The results show overlap of the spectra at the intersection of the bandwidths, which provides an extended view of surface microroughness. In the midinfrared, measurements are more difficult, and specific problems such as thermal emission are analyzed.

© 1993 Optical Society of America

Original Manuscript: November 17, 1992
Published: October 1, 1993

C. Amra, D. Torricini, and P. Roche, "Multiwavelength (0.45–10.6 μm) angle-resolved scatterometer or how to extend the optical window," Appl. Opt. 32, 5462-5474 (1993)

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  15. This work was first presented at the Joint Session on Scattering of the First Topical Meeting on Surface Roughness and Scattering and the Fifth Topical Meeting on Optical Interference Coating of the Optical Society of America that was held in Tucson, Arizona, June 1992.
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