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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 32, Iss. 28 — Oct. 1, 1993
  • pp: 5462–5474

Multiwavelength (0.45–10.6 μm) angle-resolved scatterometer or how to extend the optical window

C. Amra, D. Torricini, and P. Roche  »View Author Affiliations


Applied Optics, Vol. 32, Issue 28, pp. 5462-5474 (1993)
http://dx.doi.org/10.1364/AO.32.005462


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Abstract

An apparatus to record scattered light in whole space over a large range of visible and infrared wavelengths (0.45–10.6 μm) is described. Parasitic light, calibration, and dynamic range are discussed to point out performances and limits of the experimental setup. Angular measurements at several wavelengths give access to bidimensional roughness spectra of polished samples in different frequency bandwidths. The results show overlap of the spectra at the intersection of the bandwidths, which provides an extended view of surface microroughness. In the midinfrared, measurements are more difficult, and specific problems such as thermal emission are analyzed.

© 1993 Optical Society of America

History
Original Manuscript: November 17, 1992
Published: October 1, 1993

Citation
C. Amra, D. Torricini, and P. Roche, "Multiwavelength (0.45–10.6 μm) angle-resolved scatterometer or how to extend the optical window," Appl. Opt. 32, 5462-5474 (1993)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-32-28-5462


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References

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