Effect of an electric field on the growth of aluminum film

Cheng-Chung Lee; Chii-hua Lee; Shiuh Chao

doi:10.1364/AO.32.005575

Applied Optics
Vol. 32,
Issue 28,
pp. 5575-5578
(1993)
•https://doi.org/10.1364/AO.32.005575

Effect of an electric field on the growth of aluminum film

Cheng-Chung Lee, Chii-hua Lee, and Shiuh Chao

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Cheng-Chung Lee, Chii-hua Lee, and Shiuh Chao, "Effect of an electric field on the growth of aluminum film," Appl. Opt. 32, 5575-5578 (1993)

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Abstract

An electric field is applied to the substrate during the growth of aluminum films, with the results that the reflectance is increased, scattering is reduced, and the surface is smoothed.

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Number	Voltage (V)	σ₁ (A)	σ₂ (A)	σ₃ (A)	σ (average)
1	0	43	38	40	40.3
2	800	36	35	36	35.7
3	1200	30	30	33	31
4	1600	28	25	24	25.6
5	2000	23	19	22	21.3
6	2400	17	22	23	20.7

Number	Voltage (V)	Wavelength (nm)

		400	500	600	700
1	800	−1.79	−1.51	−1.15	−1
2	1200	−1.77	−1.73	−1.71	−1.66
3	1600	−2.54	−2.51	−2.48	−2.46
4	2000	−2.59	−2.63	−2.62	−2.61
5	2400	−3.29	−3.22	−3.17	−3.12

Number	Voltage (V)	σ₁ (A)	σ₂ (A)	σ₃ (A)	σ (average)
1	0	43	38	40	40.3
2	800	36	35	36	35.7
3	1200	30	30	33	31
4	1600	28	25	24	25.6
5	2000	23	19	22	21.3
6	2400	17	22	23	20.7

Number	Voltage (V)	Wavelength (nm)

		400	500	600	700
1	800	−1.79	−1.51	−1.15	−1
2	1200	−1.77	−1.73	−1.71	−1.66
3	1600	−2.54	−2.51	−2.48	−2.46
4	2000	−2.59	−2.63	−2.62	−2.61
5	2400	−3.29	−3.22	−3.17	−3.12

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Applied Optics