The performance of a 1-J XeCl excimer laser with a variable reflectivity mirror unstable resonator optical cavity is described. The output beam exhibits a flat profile in the near field and a far-field energy distribution with approximately 63% of the energy contained within an angle of 39 μrad (1/e2 spot size).
© 1993 Optical Society of America
Original Manuscript: April 29, 1992
Published: January 20, 1993
Terrence J. McKee and S. Fendrykowski, "Long-pulse excimer laser with a variable reflectivity mirror resonator," Appl. Opt. 32, 275-277 (1993)