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Applied Optics

Applied Optics


  • Vol. 32, Iss. 34 — Dec. 1, 1993
  • pp: 6914–6919

Laser driver for soft-x-ray projection lithography

Lloyd A. Hackel, Raymond J. Beach, C. Brent Dane, and Luis E. Zapata  »View Author Affiliations

Applied Optics, Vol. 32, Issue 34, pp. 6914-6919 (1993)

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A design of a diode-pumped Nd:YAG laser for use as the driver for a soft-x-ray projection lithography system is described. This laser will output up to 1 J per pulse with a 2- to 5-ns pulse duration and a 400-Hz pulse repetition rate. The design employs microchannel-cooled diode laser arrays, zigzag slab energy storage, a regenerative amplifier cavity that uses phase conjugator beam correction for near-diffraction-limited beam quality, and stimulated Brillouin scattering pulse compression to achieve the required pulse length.

© 1993 Optical Society of America

Original Manuscript: November 20, 1992
Published: December 1, 1993

Lloyd A. Hackel, Raymond J. Beach, C. Brent Dane, and Luis E. Zapata, "Laser driver for soft-x-ray projection lithography," Appl. Opt. 32, 6914-6919 (1993)

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  1. R. L. Kauffman, D. W. Phillion, “X-ray production efficiency at 130 Å from laser-produced plasmas,” in Soft-X-Ray Projection Lithography, J. Bokor, ed., Vol. 12 of OSA Proceedings Series (Optical Society of America, Washington, D.C., 1991), pp. 68–71.
  2. J. L. Miller, C. B. Dane, L. Zapata, L. Hackel, J. Abate, “Neodymium:glass zigzag slab regenerative amplifier laser system for x-ray lithography,” in Conference on Lasers and Electro-Optics, Vol. 12 of 1992 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1992), p. 90.
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  7. See for example. A. E. Siegman, Lasers (University Science, Mill Valley, Calif., 1986), pp. 385–386.
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  17. C. B. Dane, W. A. Neuman, L. A. Hackel, “High energy SBS pulse compression,” submitted to J. Quantum Electron. (1992).

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