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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 32, Iss. 34 — Dec. 1, 1993
  • pp: 7016–7021

Propagation errors in precision Fizeau interferometry

Chunsheng Huang  »View Author Affiliations


Applied Optics, Vol. 32, Issue 34, pp. 7016-7021 (1993)
http://dx.doi.org/10.1364/AO.32.007016


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Abstract

A general analytical form of propagation errors in Fizeau interferometry is derived. The theory holds for any type of interferometry. The influence of the third-order aberrations is investigated as numerical examples. The experimental data agree with the theoretical prediction.

© 1993 Optical Society of America

History
Original Manuscript: July 6, 1992
Published: December 1, 1993

Citation
Chunsheng Huang, "Propagation errors in precision Fizeau interferometry," Appl. Opt. 32, 7016-7021 (1993)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-32-34-7016


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References

  1. R. Jozwicki, “Influence of spherical aberration of an interferometric system on the measurement error in the case of a finite fringe,” Appl. Opt. 30, 3119–3125 (1991). [CrossRef]
  2. R. Jozwicki, “Influence of aberrations of Fizeau interferometer elements on measurement errors,” Appl. Opt. 30, 3126–3132 (1991). [CrossRef]
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  5. C. Evans, W. T. Estler, “Some observations on the performance of commercial phase measuring (Fizeau) interferometers used in surface figure metrology,” Proc. Am. Soc. Precision Eng. 4, 54–57 (1991).
  6. C. Huang, G. Lawrence, E. Levy, R. McMillan, “Performance analysis of the multichannel astrometric photometer,” in Current Developments in Optical Engineering II, R. E. Fischer, W. J. Smith, eds., Proc. Soc. Photo-Opt. Instrum. Eng.818, 408–418 (1987).
  7. C. Huang, “Design and analysis of the Astrometrical Telescope Facility,” Ph.D. dissertation (Optical Sciences Center, University of Arizona, Tucson, Ariz., 1989).
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  9. C. Huang, H. Jeong, B. Ruff, “Optimizing a DUV projection lens with a 442 nm laser interferometer,” in Advanced Optical Manufacturing and Testing, L. R. Baker, P. B. Reid, G. M. Sanger, eds., Proc. Soc. Photo-Opt. Instrum. Eng.1333, 220–228 (1990).

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