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Applied Optics

Applied Optics


  • Vol. 32, Iss. 34 — Dec. 1, 1993
  • pp: 7016–7021

Propagation errors in precision Fizeau interferometry

Chunsheng Huang  »View Author Affiliations

Applied Optics, Vol. 32, Issue 34, pp. 7016-7021 (1993)

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A general analytical form of propagation errors in Fizeau interferometry is derived. The theory holds for any type of interferometry. The influence of the third-order aberrations is investigated as numerical examples. The experimental data agree with the theoretical prediction.

© 1993 Optical Society of America

Original Manuscript: July 6, 1992
Published: December 1, 1993

Chunsheng Huang, "Propagation errors in precision Fizeau interferometry," Appl. Opt. 32, 7016-7021 (1993)

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  1. R. Jozwicki, “Influence of spherical aberration of an interferometric system on the measurement error in the case of a finite fringe,” Appl. Opt. 30, 3119–3125 (1991). [CrossRef]
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  9. C. Huang, H. Jeong, B. Ruff, “Optimizing a DUV projection lens with a 442 nm laser interferometer,” in Advanced Optical Manufacturing and Testing, L. R. Baker, P. B. Reid, G. M. Sanger, eds., Proc. Soc. Photo-Opt. Instrum. Eng.1333, 220–228 (1990).

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