Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Four-beam laser interferometry for three-dimensional microscopic coordinate measurement

Not Accessible

Your library or personal account may give you access

Abstract

We propose a new method for calibrating the three-dimensional (3-D) behavior of a scanning stage. Four laser interferometers are used to determine the position of the corner point of a corner mirror attached to the stage. We calculated the 3-D coordinate of the corner point by using only the length information given by the four laser interferometers; thus a method is realized that is traceable from the practical definition of length and that facilitates the optical alignment that is necessary for the interferometers. We calibrated a commercial 3-D stage by the proposed method with a coordinate accuracy of 20–30 nm.

© 1994 Optical Society of America

Full Article  |  PDF Article
More Like This
Absolute three-dimensional coordinate measurement by the two-point diffraction interferometry

Hyug-Gyo Rhee, Jiyoung Chu, and Yun-Woo Lee
Opt. Express 15(8) 4435-4444 (2007)

Large-scale three-dimensional object measurement: a practical coordinate mapping and image data-patching method

Wansong Li, Xianyu Su, and Zhongbao Liu
Appl. Opt. 40(20) 3326-3333 (2001)

Measurement by multidirectional interferometers of the position and orientation of a positioning stage

Jie Zhang, Tetsuya Yamaguchi, Koichi Iwata, Hisao Kikuta, and Choong Sik Park
Appl. Opt. 42(28) 5661-5669 (2003)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (12)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved