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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 33, Iss. 1 — Jan. 1, 1994
  • pp: 96–102

Fabrication and evaluation of an etched infrared diffraction grating

U. U. Graf, D. T. Jaffe, E. J. Kim, J. H. Lacy, H. Ling, J. T. Moore, and G. Rebeiz  »View Author Affiliations


Applied Optics, Vol. 33, Issue 1, pp. 96-102 (1994)
http://dx.doi.org/10.1364/AO.33.000096


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Abstract

We evaluated the optical performance of an IR echelle grating produced on a silicon wafer with anisotropic etching techniques. We measured the diffraction efficiency of a sample with a 55° blaze angle and 25-μm groove spacing. We also calculated the efficiency for typical triangular and trapezoidal groove profiles of etched gratings. The diffraction efficiency for unpolarized light can be approximately as high as the efficiency of right-angle groove gratings. The great potential of the etched silicon grating lies in its ease of fabrication, its excellent surface quality, and the high reproducibility of the production process. Compact high-resolution diffraction gratings can be produced by etching the grating pattern into the rear side of a transparent prism. When used in internal reflection, this increases the resolving power of the grating by a factor equal to the refractive index of the prism over a front surface grating of the same length.

© 1994 Optical Society of America

History
Original Manuscript: August 3, 1992
Revised Manuscript: March 11, 1993
Published: January 1, 1994

Citation
U. U. Graf, D. T. Jaffe, E. J. Kim, J. H. Lacy, H. Ling, J. T. Moore, and G. Rebeiz, "Fabrication and evaluation of an etched infrared diffraction grating," Appl. Opt. 33, 96-102 (1994)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-33-1-96


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References

  1. L. Comerford, P. Zory, “Selectively etched diffraction gratings in GaAs,” Appl. Phys. Lett. 25, 208–210 (1974). [CrossRef]
  2. W. T. Tsang, S. Wang, “Preferentially etched diffraction gratings in silicon,” J. Appl. Phys. 46, 2163–2166 (1975). [CrossRef]
  3. S. Sriram, E. P. Supertzi, “Novel V-groove structures on silicon,” Appl. Opt. 24, 1784–1787 (1985). [CrossRef] [PubMed]
  4. P. Philippe, S. Valette, O. Mata Mendez, D. Maystre, “Wavelength demultiplexer: using echelette gratings on silicon substrate,” Appl. Opt. 24, 1006–1011 (1985). [CrossRef] [PubMed]
  5. M. Josse, D. L. Kendall, “Rectangular-profile diffraction grating from single-crystal silicon,” Appl. Opt. 19, 72–76 (1980). [CrossRef] [PubMed]
  6. L. Sica, “High resolution diffraction grating,” U.S. patent4,475,792 (9October1984).
  7. H. Dekker, “An immersion grating for an astronomical spectrograph,” in Instrumentation for Ground-Based Optical Astronomy, L. B. Robinson, ed. (Springer-Verlag, New York, 1987), pp. 183–188.
  8. K. E. Petersen, “Silicon as a mechanical material,” Proc. IEEE 70, 420–457 (1982). [CrossRef]
  9. E. G. Loewen, “What’s new in gratings?,” in Instrumentation for Ground-Based Optical Astronomy, L. B. Robinson, ed. (Springer-Verlag, New York, 1987), pp. 118–123.
  10. G. W. Stroke, “Diffraction gratings,” in Handbuch der Physik, (Springer-Verlag, Berlin, 1967), Vol. 29, pp. 426–754. [CrossRef]
  11. M. C. Hutley, Diffraction Gratings (Academic, London, 1982).
  12. M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1980).
  13. R. Petit, ed., Electromagnetic Theory of Gratings (Springer-Verlag, Berlin, 1980). [CrossRef]
  14. D. Maystre, “Rigorous vector theories of diffraction gratings,” in Progress in Optics, E. Wolf, ed. (North-Holland, Amsterdam, 1984), Vol. 21, pp. 1–67. [CrossRef]
  15. D. Maystre, M. Neviere, R. Petit, “Experimental verifications and applications of the theory,” in Electromagnetic Theory of Gratings, R. Petit, ed. (Springer-Verlag, Berlin, 1980), pp. 159–225. [CrossRef]
  16. R. F. Harrington, Field Computation by Moment Methods (Macmillan, New York, 1968).
  17. J. Moore, H. Ling, U. U. Graf, D. T. Jaffe, “A boundary integral approach to the scattering from periodic gratings,” Microwave Opt. Technol. Lett. 5 (10), 480–483 (1992). [CrossRef]
  18. R. W. Wood, “On a remarkable case of uneven distribution of light in a diffraction grating spectrum,” Philos. Mag. Ser. 6 4, 396–402 (1902). [CrossRef]
  19. S. Engman, P. Lindblom, E. Leibhardt, “Improving echelle grating efficiencies,” Phys. Scr. 28, 86–88 (1983). [CrossRef]

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