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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 33, Iss. 19 — Jul. 1, 1994
  • pp: 4147–4155

Phase-measuring interferometry: new methods and error analysis

C. Joenathan  »View Author Affiliations


Applied Optics, Vol. 33, Issue 19, pp. 4147-4155 (1994)
http://dx.doi.org/10.1364/AO.33.004147


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Abstract

New methods that can be used to determine phase in phase-stepping interferometry are presented. It is shown that a combination of some of these methods can be used to reduce the error introduced by phase-stepper miscalibration and nonlinearity. Moreover these new algorithms can also be used to detect the presence of miscalibration or phase-shifter nonlinearity. A simplified approach to understanding the error introduced by miscalibration and nonlinearity of the phase stepper and its reduction in phase-shifting interferometry is also presented.

© 1994 Optical Society of America

History
Original Manuscript: June 7, 1993
Published: July 1, 1994

Citation
C. Joenathan, "Phase-measuring interferometry: new methods and error analysis," Appl. Opt. 33, 4147-4155 (1994)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-33-19-4147

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