New methods that can be used to determine phase in phase-stepping interferometry are presented. It is shown that a combination of some of these methods can be used to reduce the error introduced by phase-stepper miscalibration and nonlinearity. Moreover these new algorithms can also be used to detect the presence of miscalibration or phase-shifter nonlinearity. A simplified approach to understanding the error introduced by miscalibration and nonlinearity of the phase stepper and its reduction in phase-shifting interferometry is also presented.
© 1994 Optical Society of America
Original Manuscript: June 7, 1993
Published: July 1, 1994
C. Joenathan, "Phase-measuring interferometry: new methods and error analysis," Appl. Opt. 33, 4147-4155 (1994)